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- Q59483380 description "article published in 2016" @default.
- Q59483380 description "im April 2016 veröffentlichter wissenschaftlicher Artikel" @default.
- Q59483380 description "wetenschappelijk artikel" @default.
- Q59483380 description "наукова стаття, опублікована у квітні 2016" @default.
- Q59483380 name "Mixed-mode high-power impulse magnetron sputter deposition of tetrahedral amorphous carbon with pulse-length control of ionization" @default.
- Q59483380 name "Mixed-mode high-power impulse magnetron sputter deposition of tetrahedral amorphous carbon with pulse-length control of ionization" @default.
- Q59483380 type Item @default.
- Q59483380 label "Mixed-mode high-power impulse magnetron sputter deposition of tetrahedral amorphous carbon with pulse-length control of ionization" @default.
- Q59483380 label "Mixed-mode high-power impulse magnetron sputter deposition of tetrahedral amorphous carbon with pulse-length control of ionization" @default.
- Q59483380 prefLabel "Mixed-mode high-power impulse magnetron sputter deposition of tetrahedral amorphous carbon with pulse-length control of ionization" @default.
- Q59483380 prefLabel "Mixed-mode high-power impulse magnetron sputter deposition of tetrahedral amorphous carbon with pulse-length control of ionization" @default.
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- Q59483380 P356 1.4946841 @default.
- Q59483380 P1433 Q1987941 @default.
- Q59483380 P1476 "Mixed-mode high-power impulse magnetron sputter deposition of tetrahedral amorphous carbon with pulse-length control of ionization" @default.
- Q59483380 P2093 "D. G. McCulloch" @default.
- Q59483380 P2093 "D. R. McKenzie" @default.
- Q59483380 P2093 "J. G. Partridge" @default.
- Q59483380 P2093 "M. D. Tucker" @default.
- Q59483380 P2093 "M. Stueber" @default.
- Q59483380 P2093 "N. A. Marks" @default.
- Q59483380 P2093 "S. Ulrich" @default.
- Q59483380 P304 "155303" @default.
- Q59483380 P31 Q13442814 @default.
- Q59483380 P356 "10.1063/1.4946841" @default.
- Q59483380 P433 "15" @default.
- Q59483380 P478 "119" @default.
- Q59483380 P50 Q29326289 @default.
- Q59483380 P50 Q59483787 @default.
- Q59483380 P577 "2016-04-21T00:00:00Z" @default.