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- Q59483501 description "article scientifique publié en 2011" @default.
- Q59483501 description "im März 2011 veröffentlichter wissenschaftlicher Artikel" @default.
- Q59483501 description "wetenschappelijk artikel" @default.
- Q59483501 description "наукова стаття, опублікована в березні 2011" @default.
- Q59483501 name "The influence of deposition rate on the stress and microstructure of AlN films deposited from a filtered cathodic vacuum arc" @default.
- Q59483501 name "The influence of deposition rate on the stress and microstructure of AlN films deposited from a filtered cathodic vacuum arc" @default.
- Q59483501 type Item @default.
- Q59483501 label "The influence of deposition rate on the stress and microstructure of AlN films deposited from a filtered cathodic vacuum arc" @default.
- Q59483501 label "The influence of deposition rate on the stress and microstructure of AlN films deposited from a filtered cathodic vacuum arc" @default.
- Q59483501 prefLabel "The influence of deposition rate on the stress and microstructure of AlN films deposited from a filtered cathodic vacuum arc" @default.
- Q59483501 prefLabel "The influence of deposition rate on the stress and microstructure of AlN films deposited from a filtered cathodic vacuum arc" @default.
- Q59483501 P1433 Q59483501-7EDDC977-C45B-4FC5-AAA0-4B7C0184757E @default.
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- Q59483501 P356 Q59483501-9B2B6385-8ED5-42A4-9843-A9900E0D91E7 @default.
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- Q59483501 P478 Q59483501-E6223F1A-5101-45B2-BA19-B3F84F4E038C @default.
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- Q59483501 P921 Q59483501-2752422D-2D7E-43AE-B048-FA7B09ADB827 @default.
- Q59483501 P356 J.TSF.2011.01.273 @default.
- Q59483501 P1433 Q2062139 @default.
- Q59483501 P1476 "The influence of deposition rate on the stress and microstructure of AlN films deposited from a filtered cathodic vacuum arc" @default.
- Q59483501 P2093 "D.G. McCulloch" @default.
- Q59483501 P2093 "D.R. McKenzie" @default.
- Q59483501 P2093 "J.G. Partridge" @default.
- Q59483501 P2093 "M.B. Taylor" @default.
- Q59483501 P2860 Q30054801 @default.
- Q59483501 P2860 Q59483630 @default.
- Q59483501 P2860 Q59483639 @default.
- Q59483501 P304 "3573-3577" @default.
- Q59483501 P31 Q13442814 @default.
- Q59483501 P356 "10.1016/J.TSF.2011.01.273" @default.
- Q59483501 P433 "11" @default.
- Q59483501 P478 "519" @default.
- Q59483501 P50 Q29326289 @default.
- Q59483501 P577 "2011-03-01T00:00:00Z" @default.
- Q59483501 P921 Q1498213 @default.