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- Q59483579 description "wetenschappelijk artikel" @default.
- Q59483579 description "наукова стаття, опублікована в червні 2006" @default.
- Q59483579 name "Control of stress and delamination in single and multi-layer carbon thin films prepared by cathodic arc and RF plasma deposition and implantation" @default.
- Q59483579 name "Control of stress and delamination in single and multi-layer carbon thin films prepared by cathodic arc and RF plasma deposition and implantation" @default.
- Q59483579 type Item @default.
- Q59483579 label "Control of stress and delamination in single and multi-layer carbon thin films prepared by cathodic arc and RF plasma deposition and implantation" @default.
- Q59483579 label "Control of stress and delamination in single and multi-layer carbon thin films prepared by cathodic arc and RF plasma deposition and implantation" @default.
- Q59483579 prefLabel "Control of stress and delamination in single and multi-layer carbon thin films prepared by cathodic arc and RF plasma deposition and implantation" @default.
- Q59483579 prefLabel "Control of stress and delamination in single and multi-layer carbon thin films prepared by cathodic arc and RF plasma deposition and implantation" @default.
- Q59483579 P1433 Q59483579-307E5A9E-6299-40D7-AF36-895BA2C17882 @default.
- Q59483579 P1476 Q59483579-FD98857E-7D03-4024-8C80-3799A003B240 @default.
- Q59483579 P2093 Q59483579-25AF3BA8-1A2D-441B-A434-5AB0B8C37E94 @default.
- Q59483579 P2093 Q59483579-292E6AC1-6C23-40F7-AFFD-7C6884409BB4 @default.
- Q59483579 P2093 Q59483579-4B0021C9-C6DB-41B7-AC72-3F8CD86088C9 @default.
- Q59483579 P2093 Q59483579-648FE1C4-B54F-45B5-87FB-54691BEA45F5 @default.
- Q59483579 P2093 Q59483579-6A085606-B3A5-4A43-A809-19643631A622 @default.
- Q59483579 P304 Q59483579-BB7027A0-84EC-4E94-AA59-FDF2B024AAC4 @default.
- Q59483579 P31 Q59483579-ADDD80EB-64BD-4A3A-A8EA-1032E0167F3A @default.
- Q59483579 P356 Q59483579-F9E76CE6-D160-4F25-B0AC-7EE884EF7793 @default.
- Q59483579 P433 Q59483579-D1A27D44-42E8-4FF6-A73E-B826545D36BA @default.
- Q59483579 P478 Q59483579-041B92A7-4B0D-4B7C-8DBA-2EDA287ECC7D @default.
- Q59483579 P50 Q59483579-4FF3AB73-E6C1-40D4-8FFC-4B6E9E646ED1 @default.
- Q59483579 P577 Q59483579-6237AAF8-D1C6-494B-B782-7E27F3278FC0 @default.
- Q59483579 P921 Q59483579-D0644BB9-6301-48A3-9B7B-BCB2ADD96786 @default.
- Q59483579 P356 J.SURFCOAT.2005.11.011 @default.
- Q59483579 P1433 Q14421652 @default.
- Q59483579 P1476 "Control of stress and delamination in single and multi-layer carbon thin films prepared by cathodic arc and RF plasma deposition and implantation" @default.
- Q59483579 P2093 "D.G. McCulloch" @default.
- Q59483579 P2093 "D.R. McKenzie" @default.
- Q59483579 P2093 "E.D. Doyle" @default.
- Q59483579 P2093 "P.K. Chu" @default.
- Q59483579 P2093 "Peter C.T. Ha" @default.
- Q59483579 P304 "6405-6408" @default.
- Q59483579 P31 Q13442814 @default.
- Q59483579 P356 "10.1016/J.SURFCOAT.2005.11.011" @default.
- Q59483579 P433 "22-23" @default.
- Q59483579 P478 "200" @default.
- Q59483579 P50 Q29326289 @default.
- Q59483579 P577 "2006-06-01T00:00:00Z" @default.
- Q59483579 P921 Q1137203 @default.