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- Q59509804 description "article scientifique publié en 2013" @default.
- Q59509804 description "wetenschappelijk artikel" @default.
- Q59509804 description "наукова стаття, опублікована у вересні 2013" @default.
- Q59509804 name "Reduction of silicon dioxide interfacial layer to 4.6Å EOT by Al remote scavenging in high-κ/metal gate stacks on Si" @default.
- Q59509804 name "Reduction of silicon dioxide interfacial layer to 4.6Å EOT by Al remote scavenging in high-κ/metal gate stacks on Si" @default.
- Q59509804 type Item @default.
- Q59509804 label "Reduction of silicon dioxide interfacial layer to 4.6Å EOT by Al remote scavenging in high-κ/metal gate stacks on Si" @default.
- Q59509804 label "Reduction of silicon dioxide interfacial layer to 4.6Å EOT by Al remote scavenging in high-κ/metal gate stacks on Si" @default.
- Q59509804 prefLabel "Reduction of silicon dioxide interfacial layer to 4.6Å EOT by Al remote scavenging in high-κ/metal gate stacks on Si" @default.
- Q59509804 prefLabel "Reduction of silicon dioxide interfacial layer to 4.6Å EOT by Al remote scavenging in high-κ/metal gate stacks on Si" @default.
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- Q59509804 P921 Q59509804-BB3A0494-DF9A-4C73-B805-1D45E22D94C4 @default.
- Q59509804 P356 J.MEE.2013.03.066 @default.
- Q59509804 P1433 Q2615776 @default.
- Q59509804 P1476 "Reduction of silicon dioxide interfacial layer to 4.6Å EOT by Al remote scavenging in high-κ/metal gate stacks on Si" @default.
- Q59509804 P2093 "A. Nichau" @default.
- Q59509804 P2093 "A. Schäfer" @default.
- Q59509804 P2093 "L. Knoll" @default.
- Q59509804 P2093 "L.-Å. Ragnarsson" @default.
- Q59509804 P2093 "P. Bernardy" @default.
- Q59509804 P2093 "S. Wirths" @default.
- Q59509804 P2093 "T. Schram" @default.
- Q59509804 P2093 "U. Breuer" @default.
- Q59509804 P304 "109-112" @default.
- Q59509804 P31 Q13442814 @default.
- Q59509804 P356 "10.1016/J.MEE.2013.03.066" @default.
- Q59509804 P478 "109" @default.
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- Q59509804 P577 "2013-09-01T00:00:00Z" @default.
- Q59509804 P921 Q214781 @default.