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- Q59665561 description "article scientifique publié en 2007" @default.
- Q59665561 description "wetenschappelijk artikel" @default.
- Q59665561 description "наукова стаття, опублікована у 2007" @default.
- Q59665561 name "Formation of Silicon Nanopores and Nanopillars by a Maskless Deep Reactive Ion Etching Process" @default.
- Q59665561 name "Formation of Silicon Nanopores and Nanopillars by a Maskless Deep Reactive Ion Etching Process" @default.
- Q59665561 type Item @default.
- Q59665561 label "Formation of Silicon Nanopores and Nanopillars by a Maskless Deep Reactive Ion Etching Process" @default.
- Q59665561 label "Formation of Silicon Nanopores and Nanopillars by a Maskless Deep Reactive Ion Etching Process" @default.
- Q59665561 prefLabel "Formation of Silicon Nanopores and Nanopillars by a Maskless Deep Reactive Ion Etching Process" @default.
- Q59665561 prefLabel "Formation of Silicon Nanopores and Nanopillars by a Maskless Deep Reactive Ion Etching Process" @default.
- Q59665561 P1476 Q59665561-646A6E2C-0547-49EC-B58B-DB5A232BB353 @default.
- Q59665561 P2093 Q59665561-00BD6BAF-CF44-42D9-AD82-631BC501EA0A @default.
- Q59665561 P2093 Q59665561-BC666BBF-8070-4FAC-9381-A68CFCFF7734 @default.
- Q59665561 P2093 Q59665561-D7951DBF-59DA-4A6F-BE4D-D4405673A47D @default.
- Q59665561 P31 Q59665561-615E0EC4-E4B0-44E2-BC1B-E98003C2C140 @default.
- Q59665561 P356 Q59665561-14B504A0-9163-40A1-AE80-E9A84ECD5082 @default.
- Q59665561 P50 Q59665561-CFB2972D-00B6-41CA-9775-C8EFE7F5B804 @default.
- Q59665561 P577 Q59665561-A6ED567F-E8DF-4AB8-872C-24A4C59AA347 @default.
- Q59665561 P356 SENSOR.2007.4300078 @default.
- Q59665561 P1476 "Formation of Silicon Nanopores and Nanopillars by a Maskless Deep Reactive Ion Etching Process" @default.
- Q59665561 P2093 "Chunhua Feng" @default.
- Q59665561 P2093 "Philip C.H. Chan" @default.
- Q59665561 P2093 "Zhiyong Xiao" @default.
- Q59665561 P31 Q13442814 @default.
- Q59665561 P356 "10.1109/SENSOR.2007.4300078" @default.
- Q59665561 P50 Q45925528 @default.
- Q59665561 P577 "2007-01-01T00:00:00Z" @default.