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- Q59677442 description "wetenschappelijk artikel" @default.
- Q59677442 description "наукова стаття, опублікована в березні 2017" @default.
- Q59677442 name "Advanced surface affinity control for DSA contact hole shrink applications" @default.
- Q59677442 name "Advanced surface affinity control for DSA contact hole shrink applications" @default.
- Q59677442 type Item @default.
- Q59677442 label "Advanced surface affinity control for DSA contact hole shrink applications" @default.
- Q59677442 label "Advanced surface affinity control for DSA contact hole shrink applications" @default.
- Q59677442 prefLabel "Advanced surface affinity control for DSA contact hole shrink applications" @default.
- Q59677442 prefLabel "Advanced surface affinity control for DSA contact hole shrink applications" @default.
- Q59677442 P1476 Q59677442-0762D5E1-CD39-43C0-903A-FF2A7700E7B8 @default.
- Q59677442 P2093 Q59677442-05EE711F-AE75-47D1-A7DC-0DA6B83125C1 @default.
- Q59677442 P2093 Q59677442-0A7F443B-AE93-4630-BBFA-7EF7DB16740B @default.
- Q59677442 P2093 Q59677442-496B2F36-470F-46EE-A4DE-3F9286E3A107 @default.
- Q59677442 P2093 Q59677442-62DFAA2B-23F6-4186-B202-DA4C960CE62A @default.
- Q59677442 P2093 Q59677442-7105F4AA-64F6-4CBF-AC94-35480F9EB378 @default.
- Q59677442 P2093 Q59677442-90C68042-0787-4460-A190-B8770111E628 @default.
- Q59677442 P2093 Q59677442-921FB327-400E-42B2-A48B-C1A71F6324A1 @default.
- Q59677442 P2093 Q59677442-951CD0D5-5C7A-4427-9482-B8816756D7B5 @default.
- Q59677442 P2093 Q59677442-C64FCC27-48E5-4AE5-84CD-7ECDFD3D639C @default.
- Q59677442 P2093 Q59677442-E89131B7-F01A-46C2-831F-F19B6BE0FEE7 @default.
- Q59677442 P2093 Q59677442-F071B899-9023-497C-B1E0-65E23D7A72C8 @default.
- Q59677442 P2093 Q59677442-FE2DC1AA-6E94-458D-A53D-61C11FCED6E0 @default.
- Q59677442 P2093 Q59677442-FFE09AC1-162C-468B-97AC-7B0E0A208D95 @default.
- Q59677442 P31 Q59677442-4CB12EDC-2A85-4E43-9AA9-447389BC9381 @default.
- Q59677442 P356 Q59677442-B74F8A23-F7C6-4EF6-BD1B-EDC60F85D237 @default.
- Q59677442 P50 Q59677442-1F9F3A46-7EFB-421B-9374-5DC2DB46F9C1 @default.
- Q59677442 P577 Q59677442-E0691DAE-806D-4098-89CB-BF906C6A1611 @default.
- Q59677442 P356 12.2258043 @default.
- Q59677442 P1476 "Advanced surface affinity control for DSA contact hole shrink applications" @default.
- Q59677442 P2093 "Ahmed Gharbi" @default.
- Q59677442 P2093 "Christophe Navarro" @default.
- Q59677442 P2093 "Cédric Monget" @default.
- Q59677442 P2093 "Célia Nicolet" @default.
- Q59677442 P2093 "Céline Lapeyre" @default.
- Q59677442 P2093 "Florian Delachat" @default.
- Q59677442 P2093 "Ian Cayrefourcq" @default.
- Q59677442 P2093 "Jérôme Hazart" @default.
- Q59677442 P2093 "Laurent Pain" @default.
- Q59677442 P2093 "Maxime Argoud" @default.
- Q59677442 P2093 "Patricia Pimenta Barros" @default.
- Q59677442 P2093 "Sandra Bos" @default.
- Q59677442 P2093 "Xavier Chevalier" @default.
- Q59677442 P31 Q13442814 @default.
- Q59677442 P356 "10.1117/12.2258043" @default.
- Q59677442 P50 Q59509703 @default.
- Q59677442 P577 "2017-03-21T00:00:00Z" @default.