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- Q59677456 description "wetenschappelijk artikel" @default.
- Q59677456 description "наукова стаття, опублікована в березні 2016" @default.
- Q59677456 name "Design of new block copolymer systems to achieve thick films with defect-free structures for applications of DSA into lithographic large nodes" @default.
- Q59677456 name "Design of new block copolymer systems to achieve thick films with defect-free structures for applications of DSA into lithographic large nodes" @default.
- Q59677456 type Item @default.
- Q59677456 label "Design of new block copolymer systems to achieve thick films with defect-free structures for applications of DSA into lithographic large nodes" @default.
- Q59677456 label "Design of new block copolymer systems to achieve thick films with defect-free structures for applications of DSA into lithographic large nodes" @default.
- Q59677456 prefLabel "Design of new block copolymer systems to achieve thick films with defect-free structures for applications of DSA into lithographic large nodes" @default.
- Q59677456 prefLabel "Design of new block copolymer systems to achieve thick films with defect-free structures for applications of DSA into lithographic large nodes" @default.
- Q59677456 P1476 Q59677456-58311938-76FB-4BF1-8861-9016F6B4463D @default.
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- Q59677456 P2093 Q59677456-2C0E0DD3-B899-4999-ABB4-AF257E770ABC @default.
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- Q59677456 P2093 Q59677456-32FE5296-8804-4353-9C9D-D0886EF9C7EE @default.
- Q59677456 P2093 Q59677456-A9C25C14-AAEC-4F3E-BA12-964D457781FE @default.
- Q59677456 P2093 Q59677456-AE28B350-77C1-4EDD-B22C-EFCEAC9C4CD8 @default.
- Q59677456 P2093 Q59677456-B07283E4-704E-42B9-80A3-B1067C436843 @default.
- Q59677456 P2093 Q59677456-CB86E4BF-FB60-4CB0-ACD8-0D1E125CE099 @default.
- Q59677456 P2093 Q59677456-DC7088FD-047C-471F-93B7-CBD566345618 @default.
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- Q59677456 P2093 Q59677456-ED5AB145-6E6C-4AB6-BA93-AF3D20EDF077 @default.
- Q59677456 P2093 Q59677456-F2CFADBF-5B70-4C08-9AEF-BD7D334A3AA4 @default.
- Q59677456 P31 Q59677456-8129E403-A961-41A6-BD8F-522DBCBB6A0C @default.
- Q59677456 P356 Q59677456-F6D3849E-8F64-4CDC-B1F3-A7768DEB5300 @default.
- Q59677456 P50 Q59677456-D2F2AB07-D9D7-4714-ABC8-E5EBB3A5BD21 @default.
- Q59677456 P50 Q59677456-FD381C68-1EA4-4220-B00A-5313D54C5D50 @default.
- Q59677456 P577 Q59677456-D7463935-B57B-434B-8373-0753426B2A92 @default.
- Q59677456 P356 12.2219214 @default.
- Q59677456 P1476 "Design of new block copolymer systems to achieve thick films with defect-free structures for applications of DSA into lithographic large nodes" @default.
- Q59677456 P2093 "A. Gharbi" @default.
- Q59677456 P2093 "C. Navarro" @default.
- Q59677456 P2093 "C. Nicolet" @default.
- Q59677456 P2093 "G. Cunge" @default.
- Q59677456 P2093 "G. Hadziioannou" @default.
- Q59677456 P2093 "G. Lombard" @default.
- Q59677456 P2093 "I. Cayrefourcq" @default.
- Q59677456 P2093 "J. Beausoleil" @default.
- Q59677456 P2093 "J. Berron" @default.
- Q59677456 P2093 "K. Sakavuyi" @default.
- Q59677456 P2093 "M. Zelsmann" @default.
- Q59677456 P2093 "P. Bezard" @default.
- Q59677456 P2093 "P. Coupillaud" @default.
- Q59677456 P2093 "X. Chevalier" @default.
- Q59677456 P31 Q13442814 @default.
- Q59677456 P356 "10.1117/12.2219214" @default.
- Q59677456 P50 Q59509703 @default.
- Q59677456 P50 Q59677794 @default.
- Q59677456 P577 "2016-03-25T00:00:00Z" @default.