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- Q59677480 description "article scientifique publié en 2015" @default.
- Q59677480 description "im Jahr 2015 veröffentlichter wissenschaftlicher Artikel" @default.
- Q59677480 description "wetenschappelijk artikel" @default.
- Q59677480 description "наукова стаття, опублікована у 2015" @default.
- Q59677480 name "Contact hole shrink and multiplication by directed self-assembly of block copolymers: from material to integration" @default.
- Q59677480 name "Contact hole shrink and multiplication by directed self-assembly of block copolymers: from material to integration" @default.
- Q59677480 type Item @default.
- Q59677480 label "Contact hole shrink and multiplication by directed self-assembly of block copolymers: from material to integration" @default.
- Q59677480 label "Contact hole shrink and multiplication by directed self-assembly of block copolymers: from material to integration" @default.
- Q59677480 prefLabel "Contact hole shrink and multiplication by directed self-assembly of block copolymers: from material to integration" @default.
- Q59677480 prefLabel "Contact hole shrink and multiplication by directed self-assembly of block copolymers: from material to integration" @default.
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- Q59677480 P31 Q59677480-2E881D21-D13A-40C0-B1D5-B511D6F238BD @default.
- Q59677480 P356 Q59677480-C32FF6FC-BEDE-4A95-9646-EF66D5314C45 @default.
- Q59677480 P478 Q59677480-A1D240E0-5EC8-496E-8BE9-D86DC1B4FDFC @default.
- Q59677480 P50 Q59677480-6EA758F9-5479-45F9-9B76-967AC02A0698 @default.
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- Q59677480 P921 Q59677480-E78F1AFD-BCA3-4224-AF1D-42731BD00D90 @default.
- Q59677480 P356 OPL.2015.249 @default.
- Q59677480 P1433 Q26839757 @default.
- Q59677480 P1476 "Contact hole shrink and multiplication by directed self-assembly of block copolymers: from material to integration" @default.
- Q59677480 P2093 "Ahmed Gharbi" @default.
- Q59677480 P2093 "Christophe Navarro" @default.
- Q59677480 P2093 "Georges Hadziioannou" @default.
- Q59677480 P2093 "Jean-Paul Barnes" @default.
- Q59677480 P2093 "Maxime Argoud" @default.
- Q59677480 P2093 "Mireille Maret" @default.
- Q59677480 P2093 "Patrice Gergaud" @default.
- Q59677480 P2093 "Patricia Pimenta-Barros" @default.
- Q59677480 P2093 "Tanguy Terlier" @default.
- Q59677480 P2093 "Xavier Chevalier" @default.
- Q59677480 P31 Q13442814 @default.
- Q59677480 P356 "10.1557/OPL.2015.249" @default.
- Q59677480 P478 "1750" @default.
- Q59677480 P50 Q59509703 @default.
- Q59677480 P50 Q59677794 @default.
- Q59677480 P577 "2015-01-01T00:00:00Z" @default.
- Q59677480 P921 Q910150 @default.