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- Q59677481 description "im Juni 2015 veröffentlichter wissenschaftlicher Artikel" @default.
- Q59677481 description "wetenschappelijk artikel" @default.
- Q59677481 description "наукова стаття, опублікована в червні 2015" @default.
- Q59677481 name "Contact holes patterning by directed self-assembly of block copolymers: process window study" @default.
- Q59677481 name "Contact holes patterning by directed self-assembly of block copolymers: process window study" @default.
- Q59677481 type Item @default.
- Q59677481 label "Contact holes patterning by directed self-assembly of block copolymers: process window study" @default.
- Q59677481 label "Contact holes patterning by directed self-assembly of block copolymers: process window study" @default.
- Q59677481 prefLabel "Contact holes patterning by directed self-assembly of block copolymers: process window study" @default.
- Q59677481 prefLabel "Contact holes patterning by directed self-assembly of block copolymers: process window study" @default.
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- Q59677481 P1476 Q59677481-AD91FCDE-497C-47B0-A783-B55A770BC2A1 @default.
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- Q59677481 P304 Q59677481-E23D8283-60A8-49CA-8098-BE7C584F7E77 @default.
- Q59677481 P31 Q59677481-5312B4C0-1F79-4643-BD2A-A11741D2D805 @default.
- Q59677481 P356 Q59677481-84A41556-6C18-44ED-9682-234D09A69B27 @default.
- Q59677481 P433 Q59677481-DDD49B39-E28D-46A0-BCCB-0902DA1C7D72 @default.
- Q59677481 P478 Q59677481-0EF70E02-6E67-4F70-9584-562B6CE45CFD @default.
- Q59677481 P50 Q59677481-B44F5F80-AB40-42C6-8EF8-742AD151AB75 @default.
- Q59677481 P577 Q59677481-F1EC7008-6568-4437-961B-09433866C32E @default.
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- Q59677481 P921 Q59677481-FBA58A13-7C1A-45EC-9AFC-E3EE6A4546FB @default.
- Q59677481 P356 1.JMM.14.2.023508 @default.
- Q59677481 P1433 Q15763376 @default.
- Q59677481 P1476 "Contact holes patterning by directed self-assembly of block copolymers: process window study" @default.
- Q59677481 P2093 "Ahmed Gharbi" @default.
- Q59677481 P2093 "Celia Nicolet" @default.
- Q59677481 P2093 "Christophe Navarro" @default.
- Q59677481 P2093 "Maxime Argoud" @default.
- Q59677481 P2093 "Patricia Pimenta Barros" @default.
- Q59677481 P2093 "Xavier Chevalier" @default.
- Q59677481 P304 "023508" @default.
- Q59677481 P31 Q13442814 @default.
- Q59677481 P356 "10.1117/1.JMM.14.2.023508" @default.
- Q59677481 P433 "2" @default.
- Q59677481 P478 "14" @default.
- Q59677481 P50 Q59509703 @default.
- Q59677481 P577 "2015-06-18T00:00:00Z" @default.
- Q59677481 P921 Q214781 @default.
- Q59677481 P921 Q910150 @default.