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- Q59677482 description "wetenschappelijk artikel" @default.
- Q59677482 description "наукова стаття, опублікована в березні 2015" @default.
- Q59677482 name "DSA planarization approach to solve pattern density issue" @default.
- Q59677482 name "DSA planarization approach to solve pattern density issue" @default.
- Q59677482 type Item @default.
- Q59677482 label "DSA planarization approach to solve pattern density issue" @default.
- Q59677482 label "DSA planarization approach to solve pattern density issue" @default.
- Q59677482 prefLabel "DSA planarization approach to solve pattern density issue" @default.
- Q59677482 prefLabel "DSA planarization approach to solve pattern density issue" @default.
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- Q59677482 P577 Q59677482-458B7DE6-4043-4543-B9FB-4B97BA39A1F8 @default.
- Q59677482 P356 12.2086810 @default.
- Q59677482 P1476 "DSA planarization approach to solve pattern density issue" @default.
- Q59677482 P2093 "A. Gharbi" @default.
- Q59677482 P2093 "A. Sarrazin" @default.
- Q59677482 P2093 "C. Lapeyre" @default.
- Q59677482 P2093 "C. Monget" @default.
- Q59677482 P2093 "C. Navarro" @default.
- Q59677482 P2093 "C. Nicolet" @default.
- Q59677482 P2093 "C. Tallaron" @default.
- Q59677482 P2093 "G. Claveau" @default.
- Q59677482 P2093 "I. Servin" @default.
- Q59677482 P2093 "M. Argoud" @default.
- Q59677482 P2093 "N. Posseme" @default.
- Q59677482 P2093 "P. Pimenta Barros" @default.
- Q59677482 P2093 "S. Barnola" @default.
- Q59677482 P2093 "S. Bos" @default.
- Q59677482 P2093 "X. Chevalier" @default.
- Q59677482 P31 Q13442814 @default.
- Q59677482 P356 "10.1117/12.2086810" @default.
- Q59677482 P50 Q59509703 @default.
- Q59677482 P577 "2015-03-17T00:00:00Z" @default.