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- Q59677489 description "article by Ahmed Gharbi et al published September 2015 in Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B" @default.
- Q59677489 description "im September 2015 veröffentlichter wissenschaftlicher Artikel" @default.
- Q59677489 description "wetenschappelijk artikel" @default.
- Q59677489 description "наукова стаття, опублікована у вересні 2015" @default.
- Q59677489 name "PMMA removal options by wet development in PS-b-PMMA block copolymer for nanolithographic mask fabrication" @default.
- Q59677489 name "PMMA removal options by wet development in PS-b-PMMA block copolymer for nanolithographic mask fabrication" @default.
- Q59677489 type Item @default.
- Q59677489 label "PMMA removal options by wet development in PS-b-PMMA block copolymer for nanolithographic mask fabrication" @default.
- Q59677489 label "PMMA removal options by wet development in PS-b-PMMA block copolymer for nanolithographic mask fabrication" @default.
- Q59677489 prefLabel "PMMA removal options by wet development in PS-b-PMMA block copolymer for nanolithographic mask fabrication" @default.
- Q59677489 prefLabel "PMMA removal options by wet development in PS-b-PMMA block copolymer for nanolithographic mask fabrication" @default.
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- Q59677489 P356 1.4929548 @default.
- Q59677489 P1433 Q27724301 @default.
- Q59677489 P1476 "PMMA removal options by wet development in PS-b-PMMA block copolymer for nanolithographic mask fabrication" @default.
- Q59677489 P2093 "Ahmed Gharbi" @default.
- Q59677489 P2093 "Celia Nicolet" @default.
- Q59677489 P2093 "Christophe Navarro" @default.
- Q59677489 P2093 "Isabelle Servin" @default.
- Q59677489 P2093 "Maxime Argoud" @default.
- Q59677489 P2093 "Patricia Pimenta Barros" @default.
- Q59677489 P2093 "Xavier Chevalier" @default.
- Q59677489 P304 "051602" @default.
- Q59677489 P31 Q13442814 @default.
- Q59677489 P356 "10.1116/1.4929548" @default.
- Q59677489 P433 "5" @default.
- Q59677489 P478 "33" @default.
- Q59677489 P50 Q59509703 @default.
- Q59677489 P577 "2015-09-01T00:00:00Z" @default.