Matches in Wikidata for { <http://www.wikidata.org/entity/Q59677499> ?p ?o ?g. }
Showing items 1 to 50 of
50
with 100 items per page.
- Q59677499 description "wetenschappelijk artikel" @default.
- Q59677499 description "наукова стаття, опублікована в березні 2014" @default.
- Q59677499 name "300mm pilot line DSA contact hole process stability" @default.
- Q59677499 name "300mm pilot line DSA contact hole process stability" @default.
- Q59677499 type Item @default.
- Q59677499 label "300mm pilot line DSA contact hole process stability" @default.
- Q59677499 label "300mm pilot line DSA contact hole process stability" @default.
- Q59677499 prefLabel "300mm pilot line DSA contact hole process stability" @default.
- Q59677499 prefLabel "300mm pilot line DSA contact hole process stability" @default.
- Q59677499 P1476 Q59677499-E59FF837-C2E0-4FDB-9403-30E0D6F91A59 @default.
- Q59677499 P2093 Q59677499-25608EEB-0664-4D11-B8C4-63F9F79D78DA @default.
- Q59677499 P2093 Q59677499-335D161E-8556-4437-BAB9-F94E364A27AE @default.
- Q59677499 P2093 Q59677499-365A25E1-B2B1-4DB5-BFDD-FB0377808B55 @default.
- Q59677499 P2093 Q59677499-5C950DEE-3E3F-4F76-922C-3181507B8A59 @default.
- Q59677499 P2093 Q59677499-72F2DD68-95D1-4180-8333-FA9BFAE5D293 @default.
- Q59677499 P2093 Q59677499-83A48E8E-0DB6-4D07-A0CF-B0B926F056D9 @default.
- Q59677499 P2093 Q59677499-9594A5D2-9E8B-40CF-AD0A-9E0CB44F68B9 @default.
- Q59677499 P2093 Q59677499-B093502F-575F-43FF-B379-53291F8593FC @default.
- Q59677499 P2093 Q59677499-D69B3DCF-F441-454D-A064-9D7D3A407A71 @default.
- Q59677499 P2093 Q59677499-DE4810C8-8E95-4B1B-ABB5-56619B111227 @default.
- Q59677499 P2093 Q59677499-E305F494-0315-4D63-ACA9-8C16B6CDD2DE @default.
- Q59677499 P2093 Q59677499-EA7E68E9-E7E1-4422-A5C6-BB174481B34C @default.
- Q59677499 P2093 Q59677499-FA5C3979-0E6D-4E78-A2BD-E9D8497DD7B2 @default.
- Q59677499 P2093 Q59677499-FBD1564D-AF88-40B6-B9B6-780AE99C31CA @default.
- Q59677499 P31 Q59677499-DA7CC03D-42DC-4DCA-B2D4-176B08F7E3B6 @default.
- Q59677499 P356 Q59677499-DD67B74B-87DC-4EFD-9E98-840E620DEFF1 @default.
- Q59677499 P50 Q59677499-72EC4027-89F5-4E94-8927-430DD5461611 @default.
- Q59677499 P50 Q59677499-AB88AA09-3832-4054-BD76-34240DBC7091 @default.
- Q59677499 P577 Q59677499-7298154E-1823-4CD3-95AC-12C62DEBA935 @default.
- Q59677499 P356 12.2046315 @default.
- Q59677499 P1476 "300mm pilot line DSA contact hole process stability" @default.
- Q59677499 P2093 "A. Gharbi" @default.
- Q59677499 P2093 "C. Navarro" @default.
- Q59677499 P2093 "C. Nicolet" @default.
- Q59677499 P2093 "C. Pieczulewski" @default.
- Q59677499 P2093 "G. Chamiot-Maitral" @default.
- Q59677499 P2093 "G. Hadziioannou" @default.
- Q59677499 P2093 "I. Servin" @default.
- Q59677499 P2093 "K. Jullian" @default.
- Q59677499 P2093 "M. Argoud" @default.
- Q59677499 P2093 "M. Asai" @default.
- Q59677499 P2093 "M. Sanche" @default.
- Q59677499 P2093 "P. Pimenta Barros" @default.
- Q59677499 P2093 "S. Barnola" @default.
- Q59677499 P2093 "X. Chevalier" @default.
- Q59677499 P31 Q13442814 @default.
- Q59677499 P356 "10.1117/12.2046315" @default.
- Q59677499 P50 Q59509703 @default.
- Q59677499 P50 Q59677794 @default.
- Q59677499 P577 "2014-03-27T00:00:00Z" @default.