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- Q59677501 description "im Mai 2014 veröffentlichter wissenschaftlicher Artikel" @default.
- Q59677501 description "wetenschappelijk artikel" @default.
- Q59677501 description "наукова стаття, опублікована в травні 2014" @default.
- Q59677501 name "Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line" @default.
- Q59677501 name "Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line" @default.
- Q59677501 type Item @default.
- Q59677501 label "Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line" @default.
- Q59677501 label "Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line" @default.
- Q59677501 prefLabel "Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line" @default.
- Q59677501 prefLabel "Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line" @default.
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- Q59677501 P50 Q59677501-E237B19A-E00E-4D2D-A7E4-8CF3D974366D @default.
- Q59677501 P577 Q59677501-FD9C980C-0DAB-4B74-B07C-215CF51CA837 @default.
- Q59677501 P921 Q59677501-12816649-8874-4DD5-AAB9-CBE7BD1D3A1D @default.
- Q59677501 P356 JJAP.53.06JC05 @default.
- Q59677501 P1433 Q2366671 @default.
- Q59677501 P1476 "Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line" @default.
- Q59677501 P2093 "Ahmed Gharbi" @default.
- Q59677501 P2093 "Charles Pieczulewski" @default.
- Q59677501 P2093 "Christophe Navarro" @default.
- Q59677501 P2093 "Gaëlle Chamiot-Maitral" @default.
- Q59677501 P2093 "Gilles Cunge" @default.
- Q59677501 P2093 "Isabelle Servin" @default.
- Q59677501 P2093 "Jérôme Belledent" @default.
- Q59677501 P2093 "Karine Jullian" @default.
- Q59677501 P2093 "Masaya Asai" @default.
- Q59677501 P2093 "Maxime Argoud" @default.
- Q59677501 P2093 "Patricia Pimenta Barros" @default.
- Q59677501 P2093 "Sylvain Moulis" @default.
- Q59677501 P2093 "Sébastien Barnola" @default.
- Q59677501 P2093 "Xavier Bossy" @default.
- Q59677501 P2093 "Xavier Chevalier" @default.
- Q59677501 P304 "06JC05" @default.
- Q59677501 P31 Q13442814 @default.
- Q59677501 P356 "10.7567/JJAP.53.06JC05" @default.
- Q59677501 P433 "6S" @default.
- Q59677501 P478 "53" @default.
- Q59677501 P50 Q59509703 @default.
- Q59677501 P577 "2014-05-30T00:00:00Z" @default.
- Q59677501 P921 Q910150 @default.