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- Q59677520 description "wetenschappelijk artikel" @default.
- Q59677520 description "наукова стаття, опублікована в березні 2013" @default.
- Q59677520 name "The potential of block copolymer’s directed self-assembly for contact hole shrink and contact multiplication" @default.
- Q59677520 name "The potential of block copolymer’s directed self-assembly for contact hole shrink and contact multiplication" @default.
- Q59677520 type Item @default.
- Q59677520 label "The potential of block copolymer’s directed self-assembly for contact hole shrink and contact multiplication" @default.
- Q59677520 label "The potential of block copolymer’s directed self-assembly for contact hole shrink and contact multiplication" @default.
- Q59677520 prefLabel "The potential of block copolymer’s directed self-assembly for contact hole shrink and contact multiplication" @default.
- Q59677520 prefLabel "The potential of block copolymer’s directed self-assembly for contact hole shrink and contact multiplication" @default.
- Q59677520 P1476 Q59677520-48E69E2B-3982-42B0-9D55-18443B59466B @default.
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- Q59677520 P31 Q59677520-C9F028A0-E88D-4915-997B-34BAA2D9A707 @default.
- Q59677520 P356 Q59677520-4A13965D-0519-432F-8462-DF38C366A272 @default.
- Q59677520 P50 Q59677520-FC46B6BF-0B47-4D73-B6E4-A5E8AEA7E770 @default.
- Q59677520 P577 Q59677520-EDA2514C-9665-4E67-85F4-7F818078117C @default.
- Q59677520 P921 Q59677520-19C504FE-4AFC-4DF5-8812-52364B2757F5 @default.
- Q59677520 P356 12.2011477 @default.
- Q59677520 P1476 "The potential of block copolymer’s directed self-assembly for contact hole shrink and contact multiplication" @default.
- Q59677520 P2093 "A. Gharbi" @default.
- Q59677520 P2093 "C. Navarro" @default.
- Q59677520 P2093 "C. Pieczulewski" @default.
- Q59677520 P2093 "G. Cunge" @default.
- Q59677520 P2093 "J. Belledent" @default.
- Q59677520 P2093 "L. Pain" @default.
- Q59677520 P2093 "M. Argoud" @default.
- Q59677520 P2093 "M. Asai" @default.
- Q59677520 P2093 "P. Pimmenta Barros" @default.
- Q59677520 P2093 "S. Barnola" @default.
- Q59677520 P2093 "X. Chevalier" @default.
- Q59677520 P31 Q13442814 @default.
- Q59677520 P356 "10.1117/12.2011477" @default.
- Q59677520 P50 Q59509703 @default.
- Q59677520 P577 "2013-03-26T00:00:00Z" @default.
- Q59677520 P921 Q910150 @default.