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- Q59677526 description "wetenschappelijk artikel" @default.
- Q59677526 description "наукова стаття, опублікована в березні 2012" @default.
- Q59677526 name "Self-assembly patterning using block copolymer for advanced CMOS technology: optimisation of plasma etching process" @default.
- Q59677526 name "Self-assembly patterning using block copolymer for advanced CMOS technology: optimisation of plasma etching process" @default.
- Q59677526 type Item @default.
- Q59677526 label "Self-assembly patterning using block copolymer for advanced CMOS technology: optimisation of plasma etching process" @default.
- Q59677526 label "Self-assembly patterning using block copolymer for advanced CMOS technology: optimisation of plasma etching process" @default.
- Q59677526 prefLabel "Self-assembly patterning using block copolymer for advanced CMOS technology: optimisation of plasma etching process" @default.
- Q59677526 prefLabel "Self-assembly patterning using block copolymer for advanced CMOS technology: optimisation of plasma etching process" @default.
- Q59677526 P1476 Q59677526-84DD3482-85C9-49F0-B583-E8F58BDF810E @default.
- Q59677526 P2093 Q59677526-3AAEBE20-23F6-409A-99C9-B0176C034192 @default.
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- Q59677526 P2093 Q59677526-CBD9861D-CCA6-457E-927F-09163ACA93CA @default.
- Q59677526 P2093 Q59677526-FA651059-0201-4B1F-97DD-6AF516C7D6A9 @default.
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- Q59677526 P31 Q59677526-2F223F8B-FB51-44EA-B031-016339B8D9CB @default.
- Q59677526 P356 Q59677526-B82F6386-0266-4DC7-9193-340C743DD233 @default.
- Q59677526 P50 Q59677526-A3E524E2-871A-461A-A68C-DCFEEF667C34 @default.
- Q59677526 P50 Q59677526-EF1A6197-8E7B-495D-9409-1A6148C40468 @default.
- Q59677526 P577 Q59677526-8CE5490B-55F1-4BF8-8594-DA8965DDB490 @default.
- Q59677526 P921 Q59677526-59557772-80EA-42A8-82A5-0E45FCECA729 @default.
- Q59677526 P356 12.916399 @default.
- Q59677526 P1476 "Self-assembly patterning using block copolymer for advanced CMOS technology: optimisation of plasma etching process" @default.
- Q59677526 P2093 "C. Navarro" @default.
- Q59677526 P2093 "G. Cunge" @default.
- Q59677526 P2093 "M. Delalande" @default.
- Q59677526 P2093 "S. David" @default.
- Q59677526 P2093 "T. Chevolleau" @default.
- Q59677526 P2093 "X. Chevalier" @default.
- Q59677526 P31 Q13442814 @default.
- Q59677526 P356 "10.1117/12.916399" @default.
- Q59677526 P50 Q59509703 @default.
- Q59677526 P50 Q59677928 @default.
- Q59677526 P577 "2012-03-29T00:00:00Z" @default.
- Q59677526 P921 Q910150 @default.