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- Q59677539 description "article scientifique publié en 2010" @default.
- Q59677539 description "wetenschappelijk artikel" @default.
- Q59677539 description "наукова стаття, опублікована в березні 2010" @default.
- Q59677539 name "Continuous evolution of lithographic films through process steps: an example with 193 chemically amplified resists" @default.
- Q59677539 name "Continuous evolution of lithographic films through process steps: an example with 193 chemically amplified resists" @default.
- Q59677539 type Item @default.
- Q59677539 label "Continuous evolution of lithographic films through process steps: an example with 193 chemically amplified resists" @default.
- Q59677539 label "Continuous evolution of lithographic films through process steps: an example with 193 chemically amplified resists" @default.
- Q59677539 prefLabel "Continuous evolution of lithographic films through process steps: an example with 193 chemically amplified resists" @default.
- Q59677539 prefLabel "Continuous evolution of lithographic films through process steps: an example with 193 chemically amplified resists" @default.
- Q59677539 P1476 Q59677539-7B541AAA-D64A-4FFB-90B1-D246B1A0DDDB @default.
- Q59677539 P2093 Q59677539-22DBF28A-A1BF-4E12-8FF7-3CBAD85DABA0 @default.
- Q59677539 P2093 Q59677539-64028C1F-C2A9-4E81-B3C4-8493EB5F6F95 @default.
- Q59677539 P2093 Q59677539-9DFD0AF8-65E8-4226-B8A9-05704F9FA43A @default.
- Q59677539 P2093 Q59677539-A901A380-A516-475E-A0E0-EAAB39380636 @default.
- Q59677539 P2093 Q59677539-AFAF06B1-EC3C-4AC1-BE2B-FF3DD9639D10 @default.
- Q59677539 P31 Q59677539-5F8BEC7C-C3CA-4E6A-B170-D09EAA2284C4 @default.
- Q59677539 P356 Q59677539-5670CA00-CC73-44E2-8D8B-2F2140780785 @default.
- Q59677539 P50 Q59677539-98855189-ED35-41DA-B114-9EE10F49E68A @default.
- Q59677539 P577 Q59677539-D7B49690-F375-4EC3-BD06-33D75C537179 @default.
- Q59677539 P356 12.846087 @default.
- Q59677539 P1476 "Continuous evolution of lithographic films through process steps: an example with 193 chemically amplified resists" @default.
- Q59677539 P2093 "Claire Sourd" @default.
- Q59677539 P2093 "Damien Perret" @default.
- Q59677539 P2093 "James W. Thackeray" @default.
- Q59677539 P2093 "Patrick Paniez" @default.
- Q59677539 P2093 "Samir Derrough" @default.
- Q59677539 P31 Q13442814 @default.
- Q59677539 P356 "10.1117/12.846087" @default.
- Q59677539 P50 Q59509703 @default.
- Q59677539 P577 "2010-03-11T00:00:00Z" @default.