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- Q59707297 description "article scientifique publié en 2008" @default.
- Q59707297 description "im Januar 2008 veröffentlichter wissenschaftlicher Artikel" @default.
- Q59707297 description "scholarly article by Annelies Delabie et al published 2008 in Journal of the Electrochemical Society" @default.
- Q59707297 description "wetenschappelijk artikel" @default.
- Q59707297 description "наукова стаття, опублікована у 2008" @default.
- Q59707297 name "Atomic Layer Deposition of Hafnium Oxide on Ge and GaAs Substrates: Precursors and Surface Preparation" @default.
- Q59707297 name "Atomic Layer Deposition of Hafnium Oxide on Ge and GaAs Substrates: Precursors and Surface Preparation" @default.
- Q59707297 type Item @default.
- Q59707297 label "Atomic Layer Deposition of Hafnium Oxide on Ge and GaAs Substrates: Precursors and Surface Preparation" @default.
- Q59707297 label "Atomic Layer Deposition of Hafnium Oxide on Ge and GaAs Substrates: Precursors and Surface Preparation" @default.
- Q59707297 prefLabel "Atomic Layer Deposition of Hafnium Oxide on Ge and GaAs Substrates: Precursors and Surface Preparation" @default.
- Q59707297 prefLabel "Atomic Layer Deposition of Hafnium Oxide on Ge and GaAs Substrates: Precursors and Surface Preparation" @default.
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- Q59707297 P1476 "Atomic Layer Deposition of Hafnium Oxide on Ge and GaAs Substrates: Precursors and Surface Preparation" @default.
- Q59707297 P2093 "Alexis Franquet" @default.
- Q59707297 P2093 "Annelies Delabie" @default.
- Q59707297 P2093 "David P. Brunco" @default.
- Q59707297 P2093 "Eunji Kim" @default.
- Q59707297 P2093 "Hugo Bender" @default.
- Q59707297 P2093 "Joël Cagnon" @default.
- Q59707297 P2093 "Krishna C. Saraswat" @default.
- Q59707297 P2093 "Marc Heyns" @default.
- Q59707297 P2093 "Marc Meuris" @default.
- Q59707297 P2093 "Paola Favia" @default.
- Q59707297 P2093 "Paul C. McIntyre" @default.
- Q59707297 P2093 "Sonja Sioncke" @default.
- Q59707297 P2093 "Sven Van Elshocht" @default.
- Q59707297 P2093 "Thierry Conard" @default.
- Q59707297 P2093 "Wilfried Vandervorst" @default.
- Q59707297 P2093 "Wilman Tsai" @default.
- Q59707297 P304 "H937" @default.
- Q59707297 P31 Q13442814 @default.
- Q59707297 P356 "10.1149/1.2979144" @default.
- Q59707297 P433 "12" @default.
- Q59707297 P478 "155" @default.
- Q59707297 P50 Q46022136 @default.
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- Q59707297 P577 "2008-01-01T00:00:00Z" @default.
- Q59707297 P921 Q1119 @default.