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- Q59709244 description "im März 2016 veröffentlichter wissenschaftlicher Artikel" @default.
- Q59709244 description "wetenschappelijk artikel" @default.
- Q59709244 description "наукова стаття, опублікована в березні 2016" @default.
- Q59709244 name "Ion bombardment measurements and simulations of a low temperature VHF PECVD SiH4-H2discharge in the a-Si:H to μc-Si:H transition regime" @default.
- Q59709244 name "Ion bombardment measurements and simulations of a low temperature VHF PECVD SiH4-H2discharge in the a-Si:H to μc-Si:H transition regime" @default.
- Q59709244 type Item @default.
- Q59709244 label "Ion bombardment measurements and simulations of a low temperature VHF PECVD SiH4-H2discharge in the a-Si:H to μc-Si:H transition regime" @default.
- Q59709244 label "Ion bombardment measurements and simulations of a low temperature VHF PECVD SiH4-H2discharge in the a-Si:H to μc-Si:H transition regime" @default.
- Q59709244 prefLabel "Ion bombardment measurements and simulations of a low temperature VHF PECVD SiH4-H2discharge in the a-Si:H to μc-Si:H transition regime" @default.
- Q59709244 prefLabel "Ion bombardment measurements and simulations of a low temperature VHF PECVD SiH4-H2discharge in the a-Si:H to μc-Si:H transition regime" @default.
- Q59709244 P1433 Q59709244-56B872C2-46B1-4EEC-9B3E-6015559975C0 @default.
- Q59709244 P1476 Q59709244-F87455CB-9227-467B-ADA5-A33F71EA6C67 @default.
- Q59709244 P2093 Q59709244-532AF2AD-6658-4372-AD9E-2012A87B16A4 @default.
- Q59709244 P2093 Q59709244-8CE71BA7-4618-446B-8AAE-D6F971085059 @default.
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- Q59709244 P2093 Q59709244-D54E52F5-F316-423B-8E8B-B333D67103F9 @default.
- Q59709244 P2093 Q59709244-F7968EA7-66A4-4AFD-A010-621135681DB8 @default.
- Q59709244 P304 Q59709244-E20FC4F7-9798-4397-8172-3ACC422A65DD @default.
- Q59709244 P31 Q59709244-0E5E760E-2D75-4B95-A31C-51C49673C855 @default.
- Q59709244 P356 Q59709244-162618E3-2911-4729-B0FF-CAF25E5E5E01 @default.
- Q59709244 P433 Q59709244-2C1726EC-B2A7-4A9D-BCF3-51EB602FB4D1 @default.
- Q59709244 P478 Q59709244-92143DA5-82CD-431D-86A2-A894E4D110B8 @default.
- Q59709244 P577 Q59709244-84AA897F-629A-42BE-B37B-BDAB22F36229 @default.
- Q59709244 P356 PSSA.201532917 @default.
- Q59709244 P1433 Q2032547 @default.
- Q59709244 P1476 "Ion bombardment measurements and simulations of a low temperature VHF PECVD SiH4-H2discharge in the a-Si:H to μc-Si:H transition regime" @default.
- Q59709244 P2093 "Ioannis Poulios" @default.
- Q59709244 P2093 "Jatindra K. Rath" @default.
- Q59709244 P2093 "Kees Landheer" @default.
- Q59709244 P2093 "Ruud E. I. Schropp" @default.
- Q59709244 P2093 "Wim J. Goedheer" @default.
- Q59709244 P304 "1680-1685" @default.
- Q59709244 P31 Q13442814 @default.
- Q59709244 P356 "10.1002/PSSA.201532917" @default.
- Q59709244 P433 "7" @default.
- Q59709244 P478 "213" @default.
- Q59709244 P577 "2016-03-16T00:00:00Z" @default.