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- Q59735221 description "wetenschappelijk artikel" @default.
- Q59735221 description "наукова стаття, опублікована в червні 2002" @default.
- Q59735221 name "Deposition of a-C:H films in a dc glow discharge with a magnetron plasma localized near the anode" @default.
- Q59735221 name "Deposition of a-C:H films in a dc glow discharge with a magnetron plasma localized near the anode" @default.
- Q59735221 type Item @default.
- Q59735221 label "Deposition of a-C:H films in a dc glow discharge with a magnetron plasma localized near the anode" @default.
- Q59735221 label "Deposition of a-C:H films in a dc glow discharge with a magnetron plasma localized near the anode" @default.
- Q59735221 prefLabel "Deposition of a-C:H films in a dc glow discharge with a magnetron plasma localized near the anode" @default.
- Q59735221 prefLabel "Deposition of a-C:H films in a dc glow discharge with a magnetron plasma localized near the anode" @default.
- Q59735221 P1433 Q59735221-9F2E87C2-FA6B-4BC0-BE79-FEECF5A74B15 @default.
- Q59735221 P1476 Q59735221-0A0D2569-01FC-4BB7-90B1-D1C6B976B27D @default.
- Q59735221 P2093 Q59735221-ED4D38CE-78CC-4A23-BECA-FDD110FC9A00 @default.
- Q59735221 P2888 Q59735221-2D2B8B9D-CF44-4D64-9D7D-293ECD89AAD9 @default.
- Q59735221 P304 Q59735221-28DAB500-B500-443B-B082-2A786DA25C47 @default.
- Q59735221 P31 Q59735221-B4FA421E-9869-4441-9033-C7A03EEC5D48 @default.
- Q59735221 P356 Q59735221-970C348A-AB85-467B-9D69-3ABA51B4A433 @default.
- Q59735221 P433 Q59735221-0C4F4165-53AB-4ED6-8DB6-76E72AC25E3F @default.
- Q59735221 P478 Q59735221-9A12F056-A0F1-4058-85C7-B9DE449AA1B5 @default.
- Q59735221 P577 Q59735221-F24329A7-7901-42C9-9090-B7CC0B7CEF90 @default.
- Q59735221 P6179 Q59735221-47F2C972-84B2-4673-B1FD-3686F441B6C6 @default.
- Q59735221 P356 1.1486189 @default.
- Q59735221 P1433 Q2110860 @default.
- Q59735221 P1476 "Deposition of a-C:H films in a dc glow discharge with a magnetron plasma localized near the anode" @default.
- Q59735221 P2093 "E. A. Konshina" @default.
- Q59735221 P2888 1.1486189 @default.
- Q59735221 P304 "690-694" @default.
- Q59735221 P31 Q13442814 @default.
- Q59735221 P356 "10.1134/1.1486189" @default.
- Q59735221 P433 "6" @default.
- Q59735221 P478 "47" @default.
- Q59735221 P577 "2002-06-01T00:00:00Z" @default.
- Q59735221 P6179 "1014349405" @default.