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- Q59877899 description "article scientifique publié en 2004" @default.
- Q59877899 description "im Jahr 2004 veröffentlichter wissenschaftlicher Artikel" @default.
- Q59877899 description "scholarly article by M. Keil et al published 2004 in Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena" @default.
- Q59877899 description "wetenschappelijk artikel" @default.
- Q59877899 description "наукова стаття, опублікована у 2004" @default.
- Q59877899 name "Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography" @default.
- Q59877899 name "Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography" @default.
- Q59877899 type Item @default.
- Q59877899 label "Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography" @default.
- Q59877899 label "Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography" @default.
- Q59877899 prefLabel "Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography" @default.
- Q59877899 prefLabel "Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography" @default.
- Q59877899 P1433 Q59877899-0FCC1E51-C431-41AF-A732-2D425FA51EE9 @default.
- Q59877899 P1476 Q59877899-8C3847FA-4783-44A6-A274-395D4EB90FF6 @default.
- Q59877899 P2093 Q59877899-07628CF2-7BD7-411C-9E2A-FCC92FEFFE39 @default.
- Q59877899 P2093 Q59877899-371F70CA-9B8B-4C13-AC18-77A86324D86F @default.
- Q59877899 P2093 Q59877899-3F23E870-F71E-4B63-A388-5BFE25AB4AF5 @default.
- Q59877899 P2093 Q59877899-A7B3643E-F3CD-449F-918D-9A096EC12283 @default.
- Q59877899 P2093 Q59877899-CFD19BE0-0A85-4FCB-9241-ED4182F6768A @default.
- Q59877899 P2093 Q59877899-F9637EBA-139C-4304-90B2-AA80843023AD @default.
- Q59877899 P304 Q59877899-F2552B16-00E8-47B4-AF79-D3B5A3FBD49F @default.
- Q59877899 P31 Q59877899-B2BF0FCB-05B6-4442-BA9C-7FEF7A12FF98 @default.
- Q59877899 P356 Q59877899-C30DB2FD-75A6-4827-840D-4EB34170156E @default.
- Q59877899 P433 Q59877899-B9BCE4CD-8D54-426C-9760-018E456EBC22 @default.
- Q59877899 P478 Q59877899-599F57AD-CD8A-4686-BF42-49E5463B8166 @default.
- Q59877899 P50 Q59877899-079EFA9B-8F58-4E6B-A120-B824F86ADEF1 @default.
- Q59877899 P577 Q59877899-71DD6F74-DCB2-4C78-8612-4456FB272220 @default.
- Q59877899 P921 Q59877899-30aa40f7-4857-4eb3-8972-f23459d0afa3 @default.
- Q59877899 P356 1.1824051 @default.
- Q59877899 P1433 Q29043658 @default.
- Q59877899 P1476 "Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography" @default.
- Q59877899 P2093 "B. Heidari" @default.
- Q59877899 P2093 "E. Bolmsjö" @default.
- Q59877899 P2093 "E. Theander" @default.
- Q59877899 P2093 "G. Frennesson" @default.
- Q59877899 P2093 "M. Beck" @default.
- Q59877899 P2093 "M. Keil" @default.
- Q59877899 P304 "3283" @default.
- Q59877899 P31 Q13442814 @default.
- Q59877899 P356 "10.1116/1.1824051" @default.
- Q59877899 P433 "6" @default.
- Q59877899 P478 "22" @default.
- Q59877899 P50 Q51584498 @default.
- Q59877899 P577 "2004-01-01T00:00:00Z" @default.
- Q59877899 P921 Q744 @default.