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- Q59943677 description "im Mai 2009 veröffentlichter wissenschaftlicher Artikel" @default.
- Q59943677 description "wetenschappelijk artikel" @default.
- Q59943677 description "наукова стаття, опублікована в травні 2009" @default.
- Q59943677 name "Infrared laser-based monitoring of the silane dissociation during deposition of silicon thin films" @default.
- Q59943677 name "Infrared laser-based monitoring of the silane dissociation during deposition of silicon thin films" @default.
- Q59943677 type Item @default.
- Q59943677 label "Infrared laser-based monitoring of the silane dissociation during deposition of silicon thin films" @default.
- Q59943677 label "Infrared laser-based monitoring of the silane dissociation during deposition of silicon thin films" @default.
- Q59943677 prefLabel "Infrared laser-based monitoring of the silane dissociation during deposition of silicon thin films" @default.
- Q59943677 prefLabel "Infrared laser-based monitoring of the silane dissociation during deposition of silicon thin films" @default.
- Q59943677 P1433 Q59943677-965D29B3-BC13-4D31-9D30-2470FE80A79B @default.
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- Q59943677 P2093 Q59943677-FABCD954-1E82-4DBD-B0C7-3BCCD718C49B @default.
- Q59943677 P304 Q59943677-E7F9CD51-CC64-4909-B21A-43EA94FA44A5 @default.
- Q59943677 P31 Q59943677-F76C45AE-4DE6-4F09-A3F6-DE600D9EDD4D @default.
- Q59943677 P356 Q59943677-362B5EE7-AC09-48FC-B5E5-D5626DBDE1C8 @default.
- Q59943677 P407 Q59943677-4B4BE2F0-80BB-41A4-8B31-FB3513E422C0 @default.
- Q59943677 P433 Q59943677-521E486C-EFDE-4877-A987-A5DD81352EA4 @default.
- Q59943677 P478 Q59943677-BD07456A-D4A2-4290-A9A5-D3462DEA9D4A @default.
- Q59943677 P50 Q59943677-751A4A4A-4DD0-4EBB-AA52-45DD27060185 @default.
- Q59943677 P577 Q59943677-6F698B76-9268-42AD-B20D-C1BC2D9D6B7A @default.
- Q59943677 P921 Q59943677-7C555EEE-F7D1-414C-B971-796367DDDB80 @default.
- Q59943677 P356 1.3141520 @default.
- Q59943677 P1433 Q621615 @default.
- Q59943677 P1476 "Infrared laser-based monitoring of the silane dissociation during deposition of silicon thin films" @default.
- Q59943677 P2093 "A. Feltrin" @default.
- Q59943677 P2093 "R. Bartlome" @default.
- Q59943677 P304 "201501" @default.
- Q59943677 P31 Q13442814 @default.
- Q59943677 P356 "10.1063/1.3141520" @default.
- Q59943677 P407 Q1860 @default.
- Q59943677 P433 "20" @default.
- Q59943677 P478 "94" @default.
- Q59943677 P50 Q2966088 @default.
- Q59943677 P577 "2009-05-18T00:00:00Z" @default.
- Q59943677 P921 Q1137203 @default.