Matches in Wikidata for { <http://www.wikidata.org/entity/Q59944158> ?p ?o ?g. }
Showing items 1 to 61 of
61
with 100 items per page.
- Q59944158 description "im September 2012 veröffentlichter wissenschaftlicher Artikel" @default.
- Q59944158 description "wetenschappelijk artikel" @default.
- Q59944158 description "наукова стаття, опублікована у вересні 2012" @default.
- Q59944158 name "Optically monitoring and controlling nanoscale topography during semiconductor etching" @default.
- Q59944158 name "Optically monitoring and controlling nanoscale topography during semiconductor etching" @default.
- Q59944158 type Item @default.
- Q59944158 label "Optically monitoring and controlling nanoscale topography during semiconductor etching" @default.
- Q59944158 label "Optically monitoring and controlling nanoscale topography during semiconductor etching" @default.
- Q59944158 prefLabel "Optically monitoring and controlling nanoscale topography during semiconductor etching" @default.
- Q59944158 prefLabel "Optically monitoring and controlling nanoscale topography during semiconductor etching" @default.
- Q59944158 P1433 Q59944158-6EB253DB-E730-48DE-9F39-54773DAB213B @default.
- Q59944158 P1476 Q59944158-EDFAC34B-5A6C-4F5D-AAC4-5B1723C8B3FE @default.
- Q59944158 P2093 Q59944158-A4A66472-E7DD-4060-AC5B-4E97672DE90C @default.
- Q59944158 P2093 Q59944158-BAF52C2C-8CDC-45C8-ABAB-167F46FA5DBB @default.
- Q59944158 P2093 Q59944158-D79AD8AE-3D1D-4A99-A5BD-E190E061AE77 @default.
- Q59944158 P2507 Q59944158-62D8B1BB-7326-4CF2-82F8-6865CC094BEA @default.
- Q59944158 P2860 Q59944158-49C71C5F-746F-4713-8A18-3E1973CA219C @default.
- Q59944158 P2860 Q59944158-6BCC43EB-E719-48A6-9173-39331F758DCB @default.
- Q59944158 P2860 Q59944158-6CC1F1B1-7B15-4963-A262-E5D6D269BDFD @default.
- Q59944158 P2860 Q59944158-6F699AA5-4B82-4067-9C8A-1CC78EC804BA @default.
- Q59944158 P2860 Q59944158-86BD9FD5-4234-4F1F-AD09-8AE96F040203 @default.
- Q59944158 P2860 Q59944158-8A668FF0-8304-478D-A587-C9FB740457D6 @default.
- Q59944158 P2860 Q59944158-B7F60F0C-AA26-4E2E-90AF-55F182730852 @default.
- Q59944158 P2860 Q59944158-B942937A-8E71-4B26-B26A-85618CC84A66 @default.
- Q59944158 P2860 Q59944158-CF6CEAD8-D3AF-47E1-83F5-150227BAB684 @default.
- Q59944158 P2860 Q59944158-D16602EF-6849-45BD-B1EB-17C59A1C55ED @default.
- Q59944158 P2888 Q59944158-1F89A5D4-0EEE-4EF8-8081-195F68E880FD @default.
- Q59944158 P304 Q59944158-8908F6D8-B1F6-43BA-A5AB-AFAC16CCEC96 @default.
- Q59944158 P31 Q59944158-E1F04CEA-880B-4EE3-BDC5-28B636FC9BC8 @default.
- Q59944158 P356 Q59944158-6D11204F-180A-4261-9541-23BFE870BB2B @default.
- Q59944158 P433 Q59944158-8C2BA7EF-0856-4909-A411-40C2FCD9B853 @default.
- Q59944158 P478 Q59944158-0976BB1A-14C2-4371-BF8A-7832760E82B6 @default.
- Q59944158 P50 Q59944158-62D53DC2-F1D3-4ADB-9797-349C52DCC3CC @default.
- Q59944158 P577 Q59944158-E17DF6F4-4AC0-4781-A33F-4E330C7544FD @default.
- Q59944158 P921 Q59944158-1D0306F5-7DA7-4804-B807-50DB4943B196 @default.
- Q59944158 P356 LSA.2012.30 @default.
- Q59944158 P1433 Q29310572 @default.
- Q59944158 P1476 "Optically monitoring and controlling nanoscale topography during semiconductor etching" @default.
- Q59944158 P2093 "Chris Edwards" @default.
- Q59944158 P2093 "Gabriel Popescu" @default.
- Q59944158 P2093 "Lynford L Goddard" @default.
- Q59944158 P2507 Q59944154 @default.
- Q59944158 P2860 Q33524693 @default.
- Q59944158 P2860 Q33859171 @default.
- Q59944158 P2860 Q34333056 @default.
- Q59944158 P2860 Q34503016 @default.
- Q59944158 P2860 Q36862565 @default.
- Q59944158 P2860 Q39854459 @default.
- Q59944158 P2860 Q50764134 @default.
- Q59944158 P2860 Q60608836 @default.
- Q59944158 P2860 Q78010919 @default.
- Q59944158 P2860 Q84707245 @default.
- Q59944158 P2888 lsa.2012.30 @default.
- Q59944158 P304 "e30-e30" @default.
- Q59944158 P31 Q13442814 @default.
- Q59944158 P356 "10.1038/LSA.2012.30" @default.
- Q59944158 P433 "9" @default.
- Q59944158 P478 "1" @default.
- Q59944158 P50 Q45961431 @default.
- Q59944158 P577 "2012-09-01T00:00:00Z" @default.
- Q59944158 P921 Q11456 @default.