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- Q60043439 description "article scientifique publié en 1988" @default.
- Q60043439 description "im Juli 1988 veröffentlichter wissenschaftlicher Artikel" @default.
- Q60043439 description "wetenschappelijk artikel" @default.
- Q60043439 description "наукова стаття, опублікована в липні 1988" @default.
- Q60043439 name "Resolution limits for electron-beam lithography" @default.
- Q60043439 name "Resolution limits for electron-beam lithography" @default.
- Q60043439 type Item @default.
- Q60043439 label "Resolution limits for electron-beam lithography" @default.
- Q60043439 label "Resolution limits for electron-beam lithography" @default.
- Q60043439 prefLabel "Resolution limits for electron-beam lithography" @default.
- Q60043439 prefLabel "Resolution limits for electron-beam lithography" @default.
- Q60043439 P1433 Q60043439-E60DD803-92F4-431F-8DA0-A5D1C749A5DD @default.
- Q60043439 P1476 Q60043439-310717DC-40FA-4BDA-9F1E-8365CA003303 @default.
- Q60043439 P2093 Q60043439-AE104EA3-F8C0-4FE4-B260-E8E68146BF0F @default.
- Q60043439 P304 Q60043439-E3111A2E-7F5B-4FC4-A23A-E0A1FADAEE3F @default.
- Q60043439 P31 Q60043439-5CF45F75-55F7-494D-BF6A-F7D46C76EE48 @default.
- Q60043439 P356 Q60043439-84291A82-F111-4DA2-BFC3-C0BF9860E292 @default.
- Q60043439 P433 Q60043439-6A861409-6A73-4D5E-B411-DE5CE0484019 @default.
- Q60043439 P478 Q60043439-45D34208-1D9F-41E1-91C8-7B02F15DC388 @default.
- Q60043439 P577 Q60043439-D5928AAB-59DC-4EF3-B0A8-62D362B31AAE @default.
- Q60043439 P356 RD.324.0502 @default.
- Q60043439 P1433 Q15753899 @default.
- Q60043439 P1476 "Resolution limits for electron-beam lithography" @default.
- Q60043439 P2093 "A. N. Broers" @default.
- Q60043439 P304 "502-513" @default.
- Q60043439 P31 Q13442814 @default.
- Q60043439 P356 "10.1147/RD.324.0502" @default.
- Q60043439 P433 "4" @default.
- Q60043439 P478 "32" @default.
- Q60043439 P577 "1988-07-01T00:00:00Z" @default.