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- Q60043456 description "im November 1981 veröffentlichter wissenschaftlicher Artikel" @default.
- Q60043456 description "wetenschappelijk artikel" @default.
- Q60043456 description "наукова стаття, опублікована в листопаді 1981" @default.
- Q60043456 name "Resolution, overlay, and field size for lithography systems" @default.
- Q60043456 name "Resolution, overlay, and field size for lithography systems" @default.
- Q60043456 type Item @default.
- Q60043456 label "Resolution, overlay, and field size for lithography systems" @default.
- Q60043456 label "Resolution, overlay, and field size for lithography systems" @default.
- Q60043456 prefLabel "Resolution, overlay, and field size for lithography systems" @default.
- Q60043456 prefLabel "Resolution, overlay, and field size for lithography systems" @default.
- Q60043456 P1433 Q60043456-02EF43D0-44E9-4C5D-815B-86D9F64A5516 @default.
- Q60043456 P1476 Q60043456-9BE9887F-0FF6-47E1-931C-445E8A73B7DA @default.
- Q60043456 P2093 Q60043456-3326D732-C063-4A7D-AE4B-2930E17EF82E @default.
- Q60043456 P304 Q60043456-BC519CC8-0F68-46BA-9922-C0BBCCB355EC @default.
- Q60043456 P31 Q60043456-7DEE6884-5344-4812-9009-18FC4E782F76 @default.
- Q60043456 P356 Q60043456-70CE74C1-3047-40E7-9F44-BDAB392CE6B6 @default.
- Q60043456 P433 Q60043456-A107875A-A070-4F10-B01F-95A55FD23787 @default.
- Q60043456 P478 Q60043456-92B727F0-0930-4648-9B70-7F911D378D02 @default.
- Q60043456 P577 Q60043456-222981F6-17DA-4998-B769-E03EFA780525 @default.
- Q60043456 P356 T-ED.1981.20599 @default.
- Q60043456 P1433 Q2269764 @default.
- Q60043456 P1476 "Resolution, overlay, and field size for lithography systems" @default.
- Q60043456 P2093 "A.N. Broers" @default.
- Q60043456 P304 "1268-1278" @default.
- Q60043456 P31 Q13442814 @default.
- Q60043456 P356 "10.1109/T-ED.1981.20599" @default.
- Q60043456 P433 "11" @default.
- Q60043456 P478 "28" @default.
- Q60043456 P577 "1981-11-01T00:00:00Z" @default.