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Q60121430 description "im Mai 2011 veröffentlichter wissenschaftlicher Artikel" @default.
Q60121430 description "scholarly article by Tao Chen et al published May 2011 in Thin Solid Films" @default.
Q60121430 description "wetenschappelijk artikel" @default.
Q60121430 description "наукова стаття, опублікована в травні 2011" @default.
Q60121430 name "Aluminum doped silicon carbide thin films prepared by hot-wire CVD: Influence of the substrate temperature on material properties" @default.
Q60121430 name "Aluminum doped silicon carbide thin films prepared by hot-wire CVD: Influence of the substrate temperature on material properties" @default.
Q60121430 type Item @default.
Q60121430 label "Aluminum doped silicon carbide thin films prepared by hot-wire CVD: Influence of the substrate temperature on material properties" @default.
Q60121430 label "Aluminum doped silicon carbide thin films prepared by hot-wire CVD: Influence of the substrate temperature on material properties" @default.
Q60121430 prefLabel "Aluminum doped silicon carbide thin films prepared by hot-wire CVD: Influence of the substrate temperature on material properties" @default.
Q60121430 prefLabel "Aluminum doped silicon carbide thin films prepared by hot-wire CVD: Influence of the substrate temperature on material properties" @default.
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Q60121430 P1476 Q60121430-3765E40F-8608-4FA3-BB7D-E41BD0D81543 @default.
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Q60121430 P921 Q60121430-db74e65e-9b5b-46ba-9910-508adda07139 @default.
Q60121430 P356 J.TSF.2011.01.298 @default.
Q60121430 P1433 Q2062139 @default.
Q60121430 P1476 "Aluminum doped silicon carbide thin films prepared by hot-wire CVD: Influence of the substrate temperature on material properties" @default.
Q60121430 P2093 "Deren Yang" @default.
Q60121430 P2093 "Reinhard Carius" @default.
Q60121430 P2093 "Tao Chen" @default.
Q60121430 P2860 Q59434327 @default.
Q60121430 P2860 Q59509899 @default.
Q60121430 P2860 Q62521385 @default.
Q60121430 P2860 Q62521410 @default.
Q60121430 P2860 Q62521436 @default.
Q60121430 P2860 Q62521438 @default.
Q60121430 P304 "4516-4518" @default.
Q60121430 P31 Q13442814 @default.
Q60121430 P356 "10.1016/J.TSF.2011.01.298" @default.
Q60121430 P433 "14" @default.
Q60121430 P478 "519" @default.
Q60121430 P50 Q59446269 @default.
Q60121430 P577 "2011-05-01T00:00:00Z" @default.
Q60121430 P921 Q1137203 @default.
Q60121430 P921 Q412356 @default.
Q60121430 P921 Q663 @default.