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- Q60229123 description "2007 സപ്തംബര് 1 നു പ്രസിദ്ധീകരിച്ച ശാസ്ത്ര ലേഖനം" @default.
- Q60229123 description "artículu científicu" @default.
- Q60229123 description "scholarly article by M. Lanza et al published September 2007 in Microelectronics and Reliability" @default.
- Q60229123 description "wetenschappelijk artikel" @default.
- Q60229123 description "наукова стаття, опублікована у вересні 2007" @default.
- Q60229123 name "Influence of the manufacturing process on the electrical properties of thin (<4nm) Hafnium based high-k stacks observed with CAFM" @default.
- Q60229123 name "Influence of the manufacturing process on the electrical properties of thin" @default.
- Q60229123 type Item @default.
- Q60229123 label "Influence of the manufacturing process on the electrical properties of thin (<4nm) Hafnium based high-k stacks observed with CAFM" @default.
- Q60229123 label "Influence of the manufacturing process on the electrical properties of thin" @default.
- Q60229123 prefLabel "Influence of the manufacturing process on the electrical properties of thin (<4nm) Hafnium based high-k stacks observed with CAFM" @default.
- Q60229123 prefLabel "Influence of the manufacturing process on the electrical properties of thin" @default.
- Q60229123 P1433 Q60229123-9144FDBD-6095-4F43-B4C4-AA156B5A3C92 @default.
- Q60229123 P1476 Q60229123-919D0067-29D8-4944-92FE-FA40BA2CE00D @default.
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- Q60229123 P304 Q60229123-3BF205A4-D091-47D1-88B8-7B9AAF05A046 @default.
- Q60229123 P31 Q60229123-12FD5712-3E07-4384-A6A8-7FCDBC447D10 @default.
- Q60229123 P356 Q60229123-DA8253E1-16BA-49AB-9DCF-674769E2F05C @default.
- Q60229123 P433 Q60229123-E673D7FA-6F1F-4CDB-87F7-E44272A2FFEE @default.
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- Q60229123 P921 Q60229123-73989C7E-58B4-423D-B98E-C4BC85DC2306 @default.
- Q60229123 P356 J.MICROREL.2007.07.045 @default.
- Q60229123 P8978 LanzaPNBFRLJ07 @default.
- Q60229123 P1433 Q13852898 @default.
- Q60229123 P1476 "Influence of the manufacturing process on the electrical properties of thin (<4nm) Hafnium based high-k stacks observed with CAFM" @default.
- Q60229123 P2093 "E. Lodermeier" @default.
- Q60229123 P2093 "G. Benstetter" @default.
- Q60229123 P2093 "G. Jaschke" @default.
- Q60229123 P2093 "H. Ranzinger" @default.
- Q60229123 P2093 "M. Lanza" @default.
- Q60229123 P2093 "M. Nafria" @default.
- Q60229123 P2093 "W. Frammelsberger" @default.
- Q60229123 P304 "1424-1428" @default.
- Q60229123 P31 Q13442814 @default.
- Q60229123 P356 "10.1016/J.MICROREL.2007.07.045" @default.
- Q60229123 P433 "9-11" @default.
- Q60229123 P478 "47" @default.
- Q60229123 P50 Q57564393 @default.
- Q60229123 P577 "2007-09-01T00:00:00Z" @default.
- Q60229123 P8978 "journals/mr/LanzaPNBFRLJ07" @default.
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