Matches in Wikidata for { <http://www.wikidata.org/entity/Q60344665> ?p ?o ?g. }
Showing items 1 to 30 of
30
with 100 items per page.
- Q60344665 description "wetenschappelijk artikel" @default.
- Q60344665 description "наукова стаття, опублікована в травні 1990" @default.
- Q60344665 name "The importance of free radical recombination reactions in CF4/O2 plasma etching of silicon" @default.
- Q60344665 name "The importance of free radical recombination reactions in CF4/O2 plasma etching of silicon" @default.
- Q60344665 type Item @default.
- Q60344665 label "The importance of free radical recombination reactions in CF4/O2 plasma etching of silicon" @default.
- Q60344665 label "The importance of free radical recombination reactions in CF4/O2 plasma etching of silicon" @default.
- Q60344665 prefLabel "The importance of free radical recombination reactions in CF4/O2 plasma etching of silicon" @default.
- Q60344665 prefLabel "The importance of free radical recombination reactions in CF4/O2 plasma etching of silicon" @default.
- Q60344665 P1433 Q60344665-C9ECAD87-EA96-47DF-A7FD-E8D1F1CBC44A @default.
- Q60344665 P1476 Q60344665-40C2316A-8C07-42F4-998A-5C874D65EA19 @default.
- Q60344665 P2093 Q60344665-7A40C177-2D8F-4714-A926-2CD38DA0F2C7 @default.
- Q60344665 P2093 Q60344665-BA94AD11-4237-4705-AA93-8EC95C98028C @default.
- Q60344665 P304 Q60344665-59C6492E-9907-4817-9787-1D68116536FC @default.
- Q60344665 P31 Q60344665-4D8FF94E-D01B-4B78-99FB-98ED8DEC5D1E @default.
- Q60344665 P356 Q60344665-AC90962B-E584-41B3-A4F6-21CB536986BB @default.
- Q60344665 P433 Q60344665-372E761E-E5F0-4AE5-9912-C9FF888EFBB4 @default.
- Q60344665 P478 Q60344665-BB96351D-ECCA-4B45-B135-949C4C3C887F @default.
- Q60344665 P577 Q60344665-12EC43B2-539B-47C4-B2D0-EE19EE818010 @default.
- Q60344665 P356 1.576780 @default.
- Q60344665 P1433 Q13739484 @default.
- Q60344665 P1476 "The importance of free radical recombination reactions in CF4/O2 plasma etching of silicon" @default.
- Q60344665 P2093 "K. F. Jensen" @default.
- Q60344665 P2093 "M. Dalvie" @default.
- Q60344665 P304 "1648-1653" @default.
- Q60344665 P31 Q13442814 @default.
- Q60344665 P356 "10.1116/1.576780" @default.
- Q60344665 P433 "3" @default.
- Q60344665 P478 "8" @default.
- Q60344665 P577 "1990-05-01T00:00:00Z" @default.