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- Q60344808 description "article scientifique publié en 1986" @default.
- Q60344808 description "im Jahr 1986 veröffentlichter wissenschaftlicher Artikel" @default.
- Q60344808 description "wetenschappelijk artikel" @default.
- Q60344808 description "наукова стаття, опублікована в 1986" @default.
- Q60344808 name "Modelling of reactors for plasma processing I. Silicon etching by CF4 in a radial flow reactor" @default.
- Q60344808 name "Modelling of reactors for plasma processing I. Silicon etching by CF4 in a radial flow reactor" @default.
- Q60344808 type Item @default.
- Q60344808 label "Modelling of reactors for plasma processing I. Silicon etching by CF4 in a radial flow reactor" @default.
- Q60344808 label "Modelling of reactors for plasma processing I. Silicon etching by CF4 in a radial flow reactor" @default.
- Q60344808 prefLabel "Modelling of reactors for plasma processing I. Silicon etching by CF4 in a radial flow reactor" @default.
- Q60344808 prefLabel "Modelling of reactors for plasma processing I. Silicon etching by CF4 in a radial flow reactor" @default.
- Q60344808 P1433 Q60344808-73326210-AF51-4332-8CDD-97F623A6F9EF @default.
- Q60344808 P1476 Q60344808-81D7607D-24EB-4AF7-8255-AE40E1FE649C @default.
- Q60344808 P2093 Q60344808-457259D1-2376-4EB6-B7F2-435FD1A8760C @default.
- Q60344808 P304 Q60344808-9898402B-2026-428C-A21B-E5E7EEDEC288 @default.
- Q60344808 P31 Q60344808-2356AAFC-B344-459B-B641-1E2A2031B981 @default.
- Q60344808 P356 Q60344808-5C3A2AF3-F94E-4270-8343-B5371A9BE9B1 @default.
- Q60344808 P407 Q60344808-94697FB9-1B9E-46B5-A8B2-015A26CF9E43 @default.
- Q60344808 P433 Q60344808-179D9A3D-C44B-48B0-9FA6-0B97615393D3 @default.
- Q60344808 P478 Q60344808-4FE57966-9D18-4852-B3F0-B06D963C7903 @default.
- Q60344808 P50 Q60344808-67ABFA83-025C-46DD-9BE0-0986BB5CA864 @default.
- Q60344808 P50 Q60344808-83C301A5-578B-4334-B457-67637B81512C @default.
- Q60344808 P577 Q60344808-798CFC4F-BFB2-4438-90D3-09F299DB3608 @default.
- Q60344808 P356 0009-2509(86)87142-1 @default.
- Q60344808 P1433 Q15716780 @default.
- Q60344808 P1476 "Modelling of reactors for plasma processing I. Silicon etching by CF4 in a radial flow reactor" @default.
- Q60344808 P2093 "Manoj Dalvie" @default.
- Q60344808 P304 "653-660" @default.
- Q60344808 P31 Q13442814 @default.
- Q60344808 P356 "10.1016/0009-2509(86)87142-1" @default.
- Q60344808 P407 Q1860 @default.
- Q60344808 P433 "4" @default.
- Q60344808 P478 "41" @default.
- Q60344808 P50 Q111046524 @default.
- Q60344808 P50 Q30069671 @default.
- Q60344808 P577 "1986-01-01T00:00:00Z" @default.