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- Q60474341 description "article scientifique publié en 2005" @default.
- Q60474341 description "im Mai 2005 veröffentlichter wissenschaftlicher Artikel" @default.
- Q60474341 description "wetenschappelijk artikel" @default.
- Q60474341 description "наукова стаття, опублікована в травні 2005" @default.
- Q60474341 name "Relevance of phosphorus incorporation and hydrogen removal for Si:Pδ-doped layers fabricated using phosphine" @default.
- Q60474341 name "Relevance of phosphorus incorporation and hydrogen removal for Si:Pδ-doped layers fabricated using phosphine" @default.
- Q60474341 type Item @default.
- Q60474341 label "Relevance of phosphorus incorporation and hydrogen removal for Si:Pδ-doped layers fabricated using phosphine" @default.
- Q60474341 label "Relevance of phosphorus incorporation and hydrogen removal for Si:Pδ-doped layers fabricated using phosphine" @default.
- Q60474341 prefLabel "Relevance of phosphorus incorporation and hydrogen removal for Si:Pδ-doped layers fabricated using phosphine" @default.
- Q60474341 prefLabel "Relevance of phosphorus incorporation and hydrogen removal for Si:Pδ-doped layers fabricated using phosphine" @default.
- Q60474341 P1433 Q60474341-FCC844D8-0B6F-4663-85A7-4A6E2AEB8FB5 @default.
- Q60474341 P1476 Q60474341-8E480A18-B2F1-4EBC-BF14-5276E6DC4CDA @default.
- Q60474341 P2093 Q60474341-6C11A5AF-9AF6-4508-A340-E2F074392496 @default.
- Q60474341 P2093 Q60474341-CAB080F4-CBA0-4677-B1FE-A27BD91D0BD3 @default.
- Q60474341 P304 Q60474341-CC01A69E-8232-4905-9073-5A005417FDCD @default.
- Q60474341 P31 Q60474341-77D24E98-D056-458E-A690-7CEB4B1DBDB7 @default.
- Q60474341 P356 Q60474341-3D8EA269-26F8-496F-8DA5-CBD2DD9087D8 @default.
- Q60474341 P433 Q60474341-62654289-BA39-49C8-8CF4-6B90CFE4087C @default.
- Q60474341 P478 Q60474341-1C98FD5B-C3B6-4B5C-941B-EEA837818F69 @default.
- Q60474341 P50 Q60474341-013BF119-5627-4A73-8A0E-3CE04F3CA1F4 @default.
- Q60474341 P577 Q60474341-1F829EB0-8670-4028-A082-5EC2C9CEF1E6 @default.
- Q60474341 P356 PSSA.200460764 @default.
- Q60474341 P1433 Q2465041 @default.
- Q60474341 P1476 "Relevance of phosphorus incorporation and hydrogen removal for Si:Pδ-doped layers fabricated using phosphine" @default.
- Q60474341 P2093 "K. E. J. Goh" @default.
- Q60474341 P2093 "L. Oberbeck" @default.
- Q60474341 P304 "1002-1005" @default.
- Q60474341 P31 Q13442814 @default.
- Q60474341 P356 "10.1002/PSSA.200460764" @default.
- Q60474341 P433 "6" @default.
- Q60474341 P478 "202" @default.
- Q60474341 P50 Q16885683 @default.
- Q60474341 P577 "2005-05-01T00:00:00Z" @default.