Matches in Wikidata for { <http://www.wikidata.org/entity/Q61014349> ?p ?o ?g. }
Showing items 1 to 37 of
37
with 100 items per page.
- Q61014349 description "im September 2015 veröffentlichter wissenschaftlicher Artikel" @default.
- Q61014349 description "wetenschappelijk artikel" @default.
- Q61014349 description "наукова стаття, опублікована у вересні 2015" @default.
- Q61014349 name "Theoretical investigation of an in situ k-restore process for damaged ultra-low-k materials based on plasma enhanced fragmentation" @default.
- Q61014349 name "Theoretical investigation of an in situ k-restore process for damaged ultra-low-k materials based on plasma enhanced fragmentation" @default.
- Q61014349 type Item @default.
- Q61014349 label "Theoretical investigation of an in situ k-restore process for damaged ultra-low-k materials based on plasma enhanced fragmentation" @default.
- Q61014349 label "Theoretical investigation of an in situ k-restore process for damaged ultra-low-k materials based on plasma enhanced fragmentation" @default.
- Q61014349 prefLabel "Theoretical investigation of an in situ k-restore process for damaged ultra-low-k materials based on plasma enhanced fragmentation" @default.
- Q61014349 prefLabel "Theoretical investigation of an in situ k-restore process for damaged ultra-low-k materials based on plasma enhanced fragmentation" @default.
- Q61014349 P1433 Q61014349-F2C61787-82B9-49AB-A4B0-EA78B29DEDE3 @default.
- Q61014349 P1476 Q61014349-1C498EBD-2102-4B2E-BCA2-B231163A8BF2 @default.
- Q61014349 P2093 Q61014349-42E5F6EA-EB8C-4E6B-A1FD-926BFBB56FC3 @default.
- Q61014349 P2093 Q61014349-8DEB0EE7-D947-46D4-9A75-03F7B6DA7787 @default.
- Q61014349 P2093 Q61014349-9A6E6FBB-9F9F-4AE9-8B54-2C4EB2A887CC @default.
- Q61014349 P304 Q61014349-90254E53-70EF-4A17-B82C-1D54388BE6CA @default.
- Q61014349 P31 Q61014349-C223037D-3E04-404B-8059-DFAD95BB300C @default.
- Q61014349 P356 Q61014349-B3DF0138-4526-4B06-BC2E-768BFF833171 @default.
- Q61014349 P433 Q61014349-C880EA9D-E594-4F96-98AB-390DB2222531 @default.
- Q61014349 P478 Q61014349-75BAEC88-7144-4593-8051-BFA71C51F785 @default.
- Q61014349 P50 Q61014349-DD6EDD9C-6232-4B13-A73C-DE2216C8406B @default.
- Q61014349 P577 Q61014349-3EACA4C8-9D7F-4693-8C03-CAEBAB339D09 @default.
- Q61014349 P818 Q61014349-13A207F1-34F7-48A6-AE1B-1A852B05440C @default.
- Q61014349 P356 1.4927564 @default.
- Q61014349 P1433 Q27724301 @default.
- Q61014349 P1476 "Theoretical investigation of an in situ k-restore process for damaged ultra-low-k materials based on plasma enhanced fragmentation" @default.
- Q61014349 P2093 "Anja Förster" @default.
- Q61014349 P2093 "Christian Wagner" @default.
- Q61014349 P2093 "Jörg Schuster" @default.
- Q61014349 P304 "052203" @default.
- Q61014349 P31 Q13442814 @default.
- Q61014349 P356 "10.1116/1.4927564" @default.
- Q61014349 P433 "5" @default.
- Q61014349 P478 "33" @default.
- Q61014349 P50 Q21264652 @default.
- Q61014349 P577 "2015-09-01T00:00:00Z" @default.
- Q61014349 P818 "1706.10065" @default.