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- Q61458652 description "article scientifique publié en 1996" @default.
- Q61458652 description "im Januar 1996 veröffentlichter wissenschaftlicher Artikel" @default.
- Q61458652 description "wetenschappelijk artikel" @default.
- Q61458652 description "наукова стаття, опублікована в 1996" @default.
- Q61458652 name "Nitrogen in-situ doped poly buffer LOCOS: simple and scalable isolation technology for deep-submicron silicon devices" @default.
- Q61458652 name "Nitrogen in-situ doped poly buffer LOCOS: simple and scalable isolation technology for deep-submicron silicon devices" @default.
- Q61458652 type Item @default.
- Q61458652 label "Nitrogen in-situ doped poly buffer LOCOS: simple and scalable isolation technology for deep-submicron silicon devices" @default.
- Q61458652 label "Nitrogen in-situ doped poly buffer LOCOS: simple and scalable isolation technology for deep-submicron silicon devices" @default.
- Q61458652 prefLabel "Nitrogen in-situ doped poly buffer LOCOS: simple and scalable isolation technology for deep-submicron silicon devices" @default.
- Q61458652 prefLabel "Nitrogen in-situ doped poly buffer LOCOS: simple and scalable isolation technology for deep-submicron silicon devices" @default.
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- Q61458652 P1476 Q61458652-B0CDD6B9-9FC9-4FBA-B803-3A9DC3C42071 @default.
- Q61458652 P2093 Q61458652-1B8E1D1E-73FE-494F-97CA-39AD5AABEA03 @default.
- Q61458652 P2093 Q61458652-59DE6540-56BA-4D25-B511-84DA87709957 @default.
- Q61458652 P2093 Q61458652-6A08B663-C6A1-40B8-8654-AD33260674FC @default.
- Q61458652 P2093 Q61458652-71B6FDAB-95C3-4DC3-AE87-E61C41CB3703 @default.
- Q61458652 P2093 Q61458652-C98EFAFA-B61F-44D7-AF27-12E0F73A5262 @default.
- Q61458652 P304 Q61458652-4EBB0936-9BAE-47B6-A2BD-633EE5B844CA @default.
- Q61458652 P31 Q61458652-5CD3ABEA-EC8F-45D0-982F-B8017094F217 @default.
- Q61458652 P356 Q61458652-A9AF9E15-59F4-448D-8330-F082783384CC @default.
- Q61458652 P433 Q61458652-41C89171-502F-452F-9DFD-B8C18D8A6963 @default.
- Q61458652 P478 Q61458652-67CA77EC-CB1D-49B2-8A59-BCA17A921FDC @default.
- Q61458652 P577 Q61458652-B53648D5-BAA8-48B9-961A-47670C7ED397 @default.
- Q61458652 P356 16.481733 @default.
- Q61458652 P1433 Q2269764 @default.
- Q61458652 P1476 "Nitrogen in-situ doped poly buffer LOCOS: simple and scalable isolation technology for deep-submicron silicon devices" @default.
- Q61458652 P2093 "H. Inokawa" @default.
- Q61458652 P2093 "M. Miyake" @default.
- Q61458652 P2093 "S. Nakayama" @default.
- Q61458652 P2093 "T. Kobayashi" @default.
- Q61458652 P2093 "Y. Okazaki" @default.
- Q61458652 P304 "311-317" @default.
- Q61458652 P31 Q13442814 @default.
- Q61458652 P356 "10.1109/16.481733" @default.
- Q61458652 P433 "2" @default.
- Q61458652 P478 "43" @default.
- Q61458652 P577 "1996-01-01T00:00:00Z" @default.