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- Q61627271 description "wetenschappelijk artikel" @default.
- Q61627271 description "наукова стаття, опублікована у 2008" @default.
- Q61627271 name "Smooth sidewall in InP-based photonic crystal membrane etched by N[sub 2]-based inductively coupled plasma" @default.
- Q61627271 name "Smooth sidewall in InP-based photonic crystal membrane etched by N[sub 2]-based inductively coupled plasma" @default.
- Q61627271 type Item @default.
- Q61627271 label "Smooth sidewall in InP-based photonic crystal membrane etched by N[sub 2]-based inductively coupled plasma" @default.
- Q61627271 label "Smooth sidewall in InP-based photonic crystal membrane etched by N[sub 2]-based inductively coupled plasma" @default.
- Q61627271 prefLabel "Smooth sidewall in InP-based photonic crystal membrane etched by N[sub 2]-based inductively coupled plasma" @default.
- Q61627271 prefLabel "Smooth sidewall in InP-based photonic crystal membrane etched by N[sub 2]-based inductively coupled plasma" @default.
- Q61627271 P1433 Q61627271-FEFF8498-F4C2-4CF2-987E-45ED33F2F64E @default.
- Q61627271 P1476 Q61627271-6E8E5F05-133B-4BDE-9F0F-71B229234B53 @default.
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- Q61627271 P2093 Q61627271-9C224ED4-8ED0-49DD-8EF3-0F79F026D54A @default.
- Q61627271 P2093 Q61627271-C0986341-1405-44F4-A0C5-5807AE731BF7 @default.
- Q61627271 P304 Q61627271-BC8ED038-741E-49DC-B377-988CC7C4CF31 @default.
- Q61627271 P31 Q61627271-DA0613C0-832E-4215-BE33-8B9A132DEF5D @default.
- Q61627271 P356 Q61627271-0636CBD6-57ED-4659-AE19-3F0F97A90569 @default.
- Q61627271 P433 Q61627271-82029DB6-4BA6-4EDA-AE0E-D2D1CC605977 @default.
- Q61627271 P478 Q61627271-29FC24E5-F351-465A-924F-702F574BBCE1 @default.
- Q61627271 P50 Q61627271-F480D81E-5F95-45D5-BD57-D30F2614C67D @default.
- Q61627271 P577 Q61627271-FB69A45B-ED8D-4291-944B-06BDB1BC366C @default.
- Q61627271 P921 Q61627271-BB0B1954-C80A-4258-9151-69EA051DD927 @default.
- Q61627271 P356 1.2945299 @default.
- Q61627271 P1433 Q13739491 @default.
- Q61627271 P1476 "Smooth sidewall in InP-based photonic crystal membrane etched by N[sub 2]-based inductively coupled plasma" @default.
- Q61627271 P2093 "A. Talneau" @default.
- Q61627271 P2093 "I. Sagnes" @default.
- Q61627271 P2093 "K. H. Lee" @default.
- Q61627271 P2093 "S. Guilet" @default.
- Q61627271 P304 "1326" @default.
- Q61627271 P31 Q13442814 @default.
- Q61627271 P356 "10.1116/1.2945299" @default.
- Q61627271 P433 "4" @default.
- Q61627271 P478 "26" @default.
- Q61627271 P50 Q50939683 @default.
- Q61627271 P577 "2008-01-01T00:00:00Z" @default.
- Q61627271 P921 Q900150 @default.