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- Q61639016 description "article published in 2003" @default.
- Q61639016 description "im Oktober 2003 veröffentlichter wissenschaftlicher Artikel" @default.
- Q61639016 description "wetenschappelijk artikel" @default.
- Q61639016 description "наукова стаття, опублікована в жовтні 2003" @default.
- Q61639016 name "Polyelectrolyte nanolayers as diffusion barriers for Cu metallization" @default.
- Q61639016 name "Polyelectrolyte nanolayers as diffusion barriers for Cu metallization" @default.
- Q61639016 type Item @default.
- Q61639016 label "Polyelectrolyte nanolayers as diffusion barriers for Cu metallization" @default.
- Q61639016 label "Polyelectrolyte nanolayers as diffusion barriers for Cu metallization" @default.
- Q61639016 prefLabel "Polyelectrolyte nanolayers as diffusion barriers for Cu metallization" @default.
- Q61639016 prefLabel "Polyelectrolyte nanolayers as diffusion barriers for Cu metallization" @default.
- Q61639016 P1433 Q61639016-FAA63006-299A-4CD2-807B-12255F5B2B9B @default.
- Q61639016 P1476 Q61639016-AB208E20-6A32-4D0A-9AB7-5021CD71BF1A @default.
- Q61639016 P2093 Q61639016-951A6848-87FC-4834-8402-E54A53AD6937 @default.
- Q61639016 P2093 Q61639016-AE5126B0-4911-4AA2-B0B6-C603625B9A05 @default.
- Q61639016 P2093 Q61639016-AF0AB504-DCA1-4AC0-8998-75520C98B0CB @default.
- Q61639016 P2093 Q61639016-C23F8AA3-8BB7-4ABF-800B-8042A602B915 @default.
- Q61639016 P2093 Q61639016-C6EC8EE3-028B-40B3-8E38-0A05E511BB17 @default.
- Q61639016 P2860 Q61639016-25C5D56D-F7CE-4256-88B6-DB3AEAB2E02D @default.
- Q61639016 P2860 Q61639016-59B5BFF5-C2B7-4CCD-A879-2D5A308ED760 @default.
- Q61639016 P2860 Q61639016-6FE3AD23-80AE-49A5-B5BE-883097CA2BE0 @default.
- Q61639016 P304 Q61639016-6017903F-8CD3-427E-A0B6-9097B870C1B1 @default.
- Q61639016 P31 Q61639016-A1561F4D-9BB5-40F7-840A-BC6845A43ED4 @default.
- Q61639016 P356 Q61639016-7E8C6E0E-D34E-4621-B571-723AEF8CAC76 @default.
- Q61639016 P407 Q61639016-6B27FBC6-B1AC-4A44-BE63-8358B92F55BF @default.
- Q61639016 P433 Q61639016-159119DB-2416-4702-9FC1-366B415A39C7 @default.
- Q61639016 P478 Q61639016-10555C07-E3AE-4739-AF20-17136B278C39 @default.
- Q61639016 P577 Q61639016-4BF9BBF6-9A9E-4612-AC9E-B4974DB9840C @default.
- Q61639016 P921 Q61639016-C796D3A0-AAD3-461C-89C3-A41287455635 @default.
- Q61639016 P356 1.1618951 @default.
- Q61639016 P1433 Q621615 @default.
- Q61639016 P1476 "Polyelectrolyte nanolayers as diffusion barriers for Cu metallization" @default.
- Q61639016 P2093 "A. Ellis" @default.
- Q61639016 P2093 "G. Ramanath" @default.
- Q61639016 P2093 "J. Gamba" @default.
- Q61639016 P2093 "P. G. Ganesan" @default.
- Q61639016 P2093 "R. S. Kane" @default.
- Q61639016 P2860 Q55966433 @default.
- Q61639016 P2860 Q61639017 @default.
- Q61639016 P2860 Q74387511 @default.
- Q61639016 P304 "3302-3304" @default.
- Q61639016 P31 Q13442814 @default.
- Q61639016 P356 "10.1063/1.1618951" @default.
- Q61639016 P407 Q1860 @default.
- Q61639016 P433 "16" @default.
- Q61639016 P478 "83" @default.
- Q61639016 P577 "2003-10-20T00:00:00Z" @default.
- Q61639016 P921 Q901016 @default.