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- Q61652876 description "article scientifique publié en 1994" @default.
- Q61652876 description "wetenschappelijk artikel" @default.
- Q61652876 description "наукова стаття, опублікована в жовтні 1994" @default.
- Q61652876 name "Influence of the target/shield distance on the coatings deposition by rf magnetron sputtering" @default.
- Q61652876 name "Influence of the target/shield distance on the coatings deposition by rf magnetron sputtering" @default.
- Q61652876 type Item @default.
- Q61652876 label "Influence of the target/shield distance on the coatings deposition by rf magnetron sputtering" @default.
- Q61652876 label "Influence of the target/shield distance on the coatings deposition by rf magnetron sputtering" @default.
- Q61652876 prefLabel "Influence of the target/shield distance on the coatings deposition by rf magnetron sputtering" @default.
- Q61652876 prefLabel "Influence of the target/shield distance on the coatings deposition by rf magnetron sputtering" @default.
- Q61652876 P1433 Q61652876-9645BB0A-0FEC-4E98-A0CA-3A5ADFF264B1 @default.
- Q61652876 P1476 Q61652876-A0284DFD-2E07-4A13-B601-EAD97B9A93D8 @default.
- Q61652876 P2093 Q61652876-54F87D9C-7221-4C46-9EE2-0F8CE04081A5 @default.
- Q61652876 P2093 Q61652876-57CFBFEA-7AA3-48B3-A9E4-23397D3699A2 @default.
- Q61652876 P2093 Q61652876-BBCEA110-7C37-4BC7-99CA-B1A470709F7F @default.
- Q61652876 P304 Q61652876-08D0B2FD-684B-473A-A976-3957354FB48F @default.
- Q61652876 P31 Q61652876-604C7BCD-4EAE-4491-8706-C231F5F4A63E @default.
- Q61652876 P356 Q61652876-890F76FD-31E8-415C-8D15-834B803A8220 @default.
- Q61652876 P433 Q61652876-2657CF5C-BD45-440D-B1B0-7301049671D4 @default.
- Q61652876 P478 Q61652876-FC4F374E-F555-4A6C-8F4F-2AAE68B90C6A @default.
- Q61652876 P50 Q61652876-4B7562C4-D34F-4948-8D87-B1A5C273A8E1 @default.
- Q61652876 P577 Q61652876-20E0D72F-A5CB-4B83-A839-8C093522415B @default.
- Q61652876 P356 0042-207X(94)90033-7 @default.
- Q61652876 P1433 Q3974653 @default.
- Q61652876 P1476 "Influence of the target/shield distance on the coatings deposition by rf magnetron sputtering" @default.
- Q61652876 P2093 "A Cavaleiro" @default.
- Q61652876 P2093 "MT Vieira" @default.
- Q61652876 P2093 "N Filipe" @default.
- Q61652876 P304 "1099-1100" @default.
- Q61652876 P31 Q13442814 @default.
- Q61652876 P356 "10.1016/0042-207X(94)90033-7" @default.
- Q61652876 P433 "10-11" @default.
- Q61652876 P478 "45" @default.
- Q61652876 P50 Q56537045 @default.
- Q61652876 P577 "1994-10-01T00:00:00Z" @default.