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- Q61803366 description "article by Dirch H. Petersen et al published January 2010 in Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B" @default.
- Q61803366 description "article scientifique publié en 2010" @default.
- Q61803366 description "im Jahr 2010 veröffentlichter wissenschaftlicher Artikel" @default.
- Q61803366 description "wetenschappelijk artikel" @default.
- Q61803366 description "наукова стаття, опублікована в січні 2010" @default.
- Q61803366 name "Review of electrical characterization of ultra-shallow junctions with micro four-point probes" @default.
- Q61803366 name "Review of electrical characterization of ultra-shallow junctions with micro four-point probes" @default.
- Q61803366 type Item @default.
- Q61803366 label "Review of electrical characterization of ultra-shallow junctions with micro four-point probes" @default.
- Q61803366 label "Review of electrical characterization of ultra-shallow junctions with micro four-point probes" @default.
- Q61803366 prefLabel "Review of electrical characterization of ultra-shallow junctions with micro four-point probes" @default.
- Q61803366 prefLabel "Review of electrical characterization of ultra-shallow junctions with micro four-point probes" @default.
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- Q61803366 P356 1.3224898 @default.
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- Q61803366 P1476 "Review of electrical characterization of ultra-shallow junctions with micro four-point probes" @default.
- Q61803366 P2093 "Daniel Kjær" @default.
- Q61803366 P2093 "Dirch H. Petersen" @default.
- Q61803366 P2093 "Erik Rosseel" @default.
- Q61803366 P2093 "Nick E. B. Cowern" @default.
- Q61803366 P2093 "Nick S. Bennett" @default.
- Q61803366 P2093 "Peter F. Nielsen" @default.
- Q61803366 P2093 "Rong Lin" @default.
- Q61803366 P2093 "Torben M. Hansen" @default.
- Q61803366 P2093 "Trudo Clarysse" @default.
- Q61803366 P2093 "Wilfried Vandervorst" @default.
- Q61803366 P304 "C1C27-C1C33" @default.
- Q61803366 P31 Q13442814 @default.
- Q61803366 P356 "10.1116/1.3224898" @default.
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- Q61803366 P50 Q39067096 @default.
- Q61803366 P50 Q50539259 @default.
- Q61803366 P577 "2010-01-01T00:00:00Z" @default.