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- Q61816290 description "im Juli 2006 veröffentlichter wissenschaftlicher Artikel" @default.
- Q61816290 description "wetenschappelijk artikel" @default.
- Q61816290 description "наукова стаття, опублікована в липні 2006" @default.
- Q61816290 name "The effect of soft bake temperature on the polymerization of SU-8 photoresist" @default.
- Q61816290 name "The effect of soft bake temperature on the polymerization of SU-8 photoresist" @default.
- Q61816290 type Item @default.
- Q61816290 label "The effect of soft bake temperature on the polymerization of SU-8 photoresist" @default.
- Q61816290 label "The effect of soft bake temperature on the polymerization of SU-8 photoresist" @default.
- Q61816290 prefLabel "The effect of soft bake temperature on the polymerization of SU-8 photoresist" @default.
- Q61816290 prefLabel "The effect of soft bake temperature on the polymerization of SU-8 photoresist" @default.
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- Q61816290 P31 Q61816290-9BBF64F6-15EA-4BFA-A26A-DB57F09DE446 @default.
- Q61816290 P356 Q61816290-11A032B4-6871-4B18-A821-7F66CA2E1FD9 @default.
- Q61816290 P433 Q61816290-17216F10-9CC5-449B-9B00-B02467073013 @default.
- Q61816290 P478 Q61816290-475AC53B-689B-45CC-8486-6F3C2D2947B0 @default.
- Q61816290 P50 Q61816290-52321A98-FC15-40D1-9454-380B41317414 @default.
- Q61816290 P577 Q61816290-2A9D1EAE-610D-4CD1-845C-F490222929FE @default.
- Q61816290 P356 009 @default.
- Q61816290 P1433 Q15708721 @default.
- Q61816290 P1476 "The effect of soft bake temperature on the polymerization of SU-8 photoresist" @default.
- Q61816290 P2093 "Anders M Jorgensen" @default.
- Q61816290 P2093 "Dan A Zauner" @default.
- Q61816290 P2093 "Thomas A Anhoj" @default.
- Q61816290 P304 "1819-1824" @default.
- Q61816290 P31 Q13442814 @default.
- Q61816290 P356 "10.1088/0960-1317/16/9/009" @default.
- Q61816290 P433 "9" @default.
- Q61816290 P478 "16" @default.
- Q61816290 P50 Q60531695 @default.
- Q61816290 P577 "2006-07-28T00:00:00Z" @default.