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- Q61825355 description "article scientifique publié en 2007" @default.
- Q61825355 description "wetenschappelijk artikel" @default.
- Q61825355 description "наукова стаття, опублікована в травні 2007" @default.
- Q61825355 name "Fabrication of nanogaps for MEMS prototyping using focused ion beam as a lithographic tool and reactive ion etching pattern transfer" @default.
- Q61825355 name "Fabrication of nanogaps for MEMS prototyping using focused ion beam as a lithographic tool and reactive ion etching pattern transfer" @default.
- Q61825355 type Item @default.
- Q61825355 label "Fabrication of nanogaps for MEMS prototyping using focused ion beam as a lithographic tool and reactive ion etching pattern transfer" @default.
- Q61825355 label "Fabrication of nanogaps for MEMS prototyping using focused ion beam as a lithographic tool and reactive ion etching pattern transfer" @default.
- Q61825355 prefLabel "Fabrication of nanogaps for MEMS prototyping using focused ion beam as a lithographic tool and reactive ion etching pattern transfer" @default.
- Q61825355 prefLabel "Fabrication of nanogaps for MEMS prototyping using focused ion beam as a lithographic tool and reactive ion etching pattern transfer" @default.
- Q61825355 P1433 Q61825355-8BECA90B-0AD5-450A-A12A-7B09DED3D686 @default.
- Q61825355 P1476 Q61825355-CB4A7021-DB75-4FD1-8CE8-B35142BC75C6 @default.
- Q61825355 P2093 Q61825355-0F837E84-4F9F-46F7-B7BA-DBA7190600D4 @default.
- Q61825355 P2093 Q61825355-0F8D70C0-019F-4FFC-9AF2-4FAFC3A51CA4 @default.
- Q61825355 P2093 Q61825355-23BA11EE-AA5B-4D5A-9E33-CA9CFDF40948 @default.
- Q61825355 P2093 Q61825355-36C1E215-2007-4B3E-A3CA-15428B7C02AA @default.
- Q61825355 P2093 Q61825355-6740E9CC-B298-4CFA-843F-A0A39DA55938 @default.
- Q61825355 P2093 Q61825355-FA0BA56F-7F8F-4EDE-A248-CC23133C4D1D @default.
- Q61825355 P304 Q61825355-21DA73A0-181A-4DD3-B2CC-31AD8CD3D7B4 @default.
- Q61825355 P31 Q61825355-84A14C2B-34E3-4C7B-87D0-99D44B828D87 @default.
- Q61825355 P356 Q61825355-B8BDEA7F-46BC-4DA5-9A78-0C3F5CF8DEA4 @default.
- Q61825355 P433 Q61825355-A08C340A-6916-48CA-8DC1-58934C16A0DD @default.
- Q61825355 P478 Q61825355-E7C9784F-DB75-47E8-8E33-022A26667B69 @default.
- Q61825355 P50 Q61825355-699C8F33-2E61-4669-BD64-C2A461B91176 @default.
- Q61825355 P50 Q61825355-70FF6E88-E874-4F05-91FD-E573FA28B8CC @default.
- Q61825355 P50 Q61825355-71CEF4F6-A4FA-472F-ABF8-E8B134B83994 @default.
- Q61825355 P577 Q61825355-D97C8A56-0EED-4526-808F-A793407E7DCE @default.
- Q61825355 P921 Q61825355-5FD07D5A-E53B-4C51-934D-9911F845625E @default.
- Q61825355 P356 J.MEE.2007.01.074 @default.
- Q61825355 P1433 Q2615776 @default.
- Q61825355 P1476 "Fabrication of nanogaps for MEMS prototyping using focused ion beam as a lithographic tool and reactive ion etching pattern transfer" @default.
- Q61825355 P2093 "Cristina Martin" @default.
- Q61825355 P2093 "Eric Bourhis" @default.
- Q61825355 P2093 "Jacques Gierak" @default.
- Q61825355 P2093 "Lars Bruchhaus" @default.
- Q61825355 P2093 "Maria Villarroya" @default.
- Q61825355 P2093 "Ralf Jede" @default.
- Q61825355 P304 "1215-1218" @default.
- Q61825355 P31 Q13442814 @default.
- Q61825355 P356 "10.1016/J.MEE.2007.01.074" @default.
- Q61825355 P433 "5-8" @default.
- Q61825355 P478 "84" @default.
- Q61825355 P50 Q39752875 @default.
- Q61825355 P50 Q55762197 @default.
- Q61825355 P50 Q59566458 @default.
- Q61825355 P577 "2007-05-01T00:00:00Z" @default.
- Q61825355 P921 Q214781 @default.