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- Q61825712 description "article published in 2015" @default.
- Q61825712 description "article scientifique publié en 2015" @default.
- Q61825712 description "wetenschappelijk artikel" @default.
- Q61825712 description "наукова стаття, опублікована в лютому 2015" @default.
- Q61825712 name "Effect of the blistering of ALD Al 2 O 3 films on the silicon surface in Al-Al 2 O 3 -Si structures" @default.
- Q61825712 name "Effect of the blistering of ALD Al 2 O 3 films on the silicon surface in Al-Al 2 O 3 -Si structures" @default.
- Q61825712 type Item @default.
- Q61825712 label "Effect of the blistering of ALD Al 2 O 3 films on the silicon surface in Al-Al 2 O 3 -Si structures" @default.
- Q61825712 label "Effect of the blistering of ALD Al 2 O 3 films on the silicon surface in Al-Al 2 O 3 -Si structures" @default.
- Q61825712 prefLabel "Effect of the blistering of ALD Al 2 O 3 films on the silicon surface in Al-Al 2 O 3 -Si structures" @default.
- Q61825712 prefLabel "Effect of the blistering of ALD Al 2 O 3 films on the silicon surface in Al-Al 2 O 3 -Si structures" @default.
- Q61825712 P1476 Q61825712-B8524670-ED0D-4641-B476-7536CDB45D04 @default.
- Q61825712 P2093 Q61825712-35108E2E-5FBD-4ADD-AB2A-333CC1261874 @default.
- Q61825712 P2093 Q61825712-5F76F744-65C2-4F2E-B4E2-4A79F5B33C6D @default.
- Q61825712 P2093 Q61825712-74F714C0-300B-472F-B27A-F96A12EE47D4 @default.
- Q61825712 P2093 Q61825712-DD59CCD0-7D26-43F1-AC30-A39B6979AB10 @default.
- Q61825712 P31 Q61825712-F0112AAD-0094-4871-B85F-8BD3C34BA21F @default.
- Q61825712 P356 Q61825712-0A52EEBD-B2F7-4E95-9145-2120C3B0841C @default.
- Q61825712 P50 Q61825712-DA8B81D0-AC0A-4DFB-B3B9-D1D2FB6C1E33 @default.
- Q61825712 P50 Q61825712-F3F3DAE3-7DD7-489D-A072-BB35C6A06603 @default.
- Q61825712 P577 Q61825712-87663F5E-8A4E-491A-9270-FDD28E5367C7 @default.
- Q61825712 P356 CDE.2015.7087443 @default.
- Q61825712 P1476 "Effect of the blistering of ALD Al 2 O 3 films on the silicon surface in Al-Al 2 O 3 -Si structures" @default.
- Q61825712 P2093 "M. B. Gonzalez" @default.
- Q61825712 P2093 "M. Duch" @default.
- Q61825712 P2093 "M. Zabala" @default.
- Q61825712 P2093 "M.C. Acero" @default.
- Q61825712 P31 Q13442814 @default.
- Q61825712 P356 "10.1109/CDE.2015.7087443" @default.
- Q61825712 P50 Q58378427 @default.
- Q61825712 P50 Q61827142 @default.
- Q61825712 P577 "2015-02-01T00:00:00Z" @default.