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- Q61826016 description "article scientifique publié en 2005" @default.
- Q61826016 description "im September 2005 veröffentlichter wissenschaftlicher Artikel" @default.
- Q61826016 description "wetenschappelijk artikel" @default.
- Q61826016 description "наукова стаття, опублікована у вересні 2005" @default.
- Q61826016 name "Mirror electrostatic actuation of a medium-infrared tuneable Fabry-Perot interferometer based on a surface micromachining process" @default.
- Q61826016 name "Mirror electrostatic actuation of a medium-infrared tuneable Fabry-Perot interferometer based on a surface micromachining process" @default.
- Q61826016 type Item @default.
- Q61826016 label "Mirror electrostatic actuation of a medium-infrared tuneable Fabry-Perot interferometer based on a surface micromachining process" @default.
- Q61826016 label "Mirror electrostatic actuation of a medium-infrared tuneable Fabry-Perot interferometer based on a surface micromachining process" @default.
- Q61826016 prefLabel "Mirror electrostatic actuation of a medium-infrared tuneable Fabry-Perot interferometer based on a surface micromachining process" @default.
- Q61826016 prefLabel "Mirror electrostatic actuation of a medium-infrared tuneable Fabry-Perot interferometer based on a surface micromachining process" @default.
- Q61826016 P1433 Q61826016-E7DA5143-0CCC-48C1-966A-F5E110E9C1CF @default.
- Q61826016 P1476 Q61826016-6D81ADCA-954E-47C9-9F4E-FD9C36679F4D @default.
- Q61826016 P2093 Q61826016-20FD1489-1318-4DDD-A96F-8E2554C637BF @default.
- Q61826016 P2093 Q61826016-27B06FF9-7FCA-4400-8DA4-797D475C4C8C @default.
- Q61826016 P2093 Q61826016-67A2A116-91A5-4648-896C-E5D11FF8A0C8 @default.
- Q61826016 P2093 Q61826016-769D42D7-C59B-4A50-9DE2-DE028F7D2554 @default.
- Q61826016 P2093 Q61826016-8528F1AC-ECDE-4EA0-AC3B-D34FEFF0E180 @default.
- Q61826016 P2093 Q61826016-E634577F-E840-474D-8F7B-E0F5DA4E1A0A @default.
- Q61826016 P304 Q61826016-D4421299-DED9-4C0D-9B07-04C208A23869 @default.
- Q61826016 P31 Q61826016-188EAE54-26A1-43B8-A99B-91B3F7FFD380 @default.
- Q61826016 P356 Q61826016-69BC0C4A-F165-4B8D-9BA5-CA8CAE5A89DF @default.
- Q61826016 P478 Q61826016-EB705AB5-F028-4ACB-BC79-2105E5097C11 @default.
- Q61826016 P50 Q61826016-02F0A0C9-8FB8-42C6-B96F-6539B00F536F @default.
- Q61826016 P50 Q61826016-64814B7C-F16C-43F5-A7FF-3DA6E4354F52 @default.
- Q61826016 P50 Q61826016-712B1F2E-8833-4C28-B752-AA19A9418674 @default.
- Q61826016 P577 Q61826016-9FAAC0ED-BA80-495D-9DB1-D41534922EE9 @default.
- Q61826016 P921 Q61826016-3ED766B8-2B3F-4ECC-B593-A92477B79C04 @default.
- Q61826016 P356 J.SNA.2005.03.036 @default.
- Q61826016 P1433 Q3478639 @default.
- Q61826016 P1476 "Mirror electrostatic actuation of a medium-infrared tuneable Fabry-Perot interferometer based on a surface micromachining process" @default.
- Q61826016 P2093 "C. Calaza" @default.
- Q61826016 P2093 "C. Cané" @default.
- Q61826016 P2093 "M. Moreno" @default.
- Q61826016 P2093 "N. Sabaté" @default.
- Q61826016 P2093 "R. Rubio" @default.
- Q61826016 P2093 "S. Marco" @default.
- Q61826016 P304 "584-589" @default.
- Q61826016 P31 Q13442814 @default.
- Q61826016 P356 "10.1016/J.SNA.2005.03.036" @default.
- Q61826016 P478 "123-124" @default.
- Q61826016 P50 Q57049613 @default.
- Q61826016 P50 Q58476301 @default.
- Q61826016 P50 Q58800784 @default.
- Q61826016 P577 "2005-09-01T00:00:00Z" @default.
- Q61826016 P921 Q214781 @default.