Matches in Wikidata for { <http://www.wikidata.org/entity/Q62124422> ?p ?o ?g. }
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- Q62124422 description "2003 nî lūn-bûn" @default.
- Q62124422 description "2003年の論文" @default.
- Q62124422 description "2003年学术文章" @default.
- Q62124422 description "2003年学术文章" @default.
- Q62124422 description "2003年学术文章" @default.
- Q62124422 description "2003年学术文章" @default.
- Q62124422 description "2003年学术文章" @default.
- Q62124422 description "2003年学术文章" @default.
- Q62124422 description "2003年學術文章" @default.
- Q62124422 description "2003年學術文章" @default.
- Q62124422 description "2003年學術文章" @default.
- Q62124422 description "2003年學術文章" @default.
- Q62124422 description "2003年學術文章" @default.
- Q62124422 description "2003년 논문" @default.
- Q62124422 description "article científic" @default.
- Q62124422 description "article scientific" @default.
- Q62124422 description "article scientifique" @default.
- Q62124422 description "articol științific" @default.
- Q62124422 description "articolo scientifico" @default.
- Q62124422 description "artigo científico" @default.
- Q62124422 description "artigo científico" @default.
- Q62124422 description "artigo científico" @default.
- Q62124422 description "artikel ilmiah" @default.
- Q62124422 description "artikull shkencor" @default.
- Q62124422 description "artikulong pang-agham" @default.
- Q62124422 description "artykuł naukowy" @default.
- Q62124422 description "artículo científico publicado en 2003" @default.
- Q62124422 description "artículu científicu" @default.
- Q62124422 description "bilimsel makale" @default.
- Q62124422 description "bài báo khoa học" @default.
- Q62124422 description "naučni članak" @default.
- Q62124422 description "scienca artikolo" @default.
- Q62124422 description "scientific article published in 2003" @default.
- Q62124422 description "scientific article published in 2003" @default.
- Q62124422 description "scientific article published in 2003" @default.
- Q62124422 description "teaduslik artikkel" @default.
- Q62124422 description "tieteellinen artikkeli" @default.
- Q62124422 description "tudományos cikk" @default.
- Q62124422 description "vedecký článok" @default.
- Q62124422 description "vetenskaplig artikel" @default.
- Q62124422 description "videnskabelig artikel" @default.
- Q62124422 description "vitenskapelig artikkel" @default.
- Q62124422 description "vitskapeleg artikkel" @default.
- Q62124422 description "vědecký článek" @default.
- Q62124422 description "wetenschappelijk artikel" @default.
- Q62124422 description "wissenschaftlicher Artikel" @default.
- Q62124422 description "επιστημονικό άρθρο" @default.
- Q62124422 description "мақолаи илмӣ" @default.
- Q62124422 description "наукова стаття, опублікована у 2003" @default.
- Q62124422 description "научна статия" @default.
- Q62124422 description "научная статья" @default.
- Q62124422 description "научни чланак" @default.
- Q62124422 description "научни чланак" @default.
- Q62124422 description "מאמר מדעי" @default.
- Q62124422 description "مقالة علمية نشرت في 2003" @default.
- Q62124422 description "২০০৩-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q62124422 description "บทความทางวิทยาศาสตร์" @default.
- Q62124422 description "სამეცნიერო სტატია" @default.
- Q62124422 name "Effects of Chamber Wall Conditions on Cl Concentration and Si Etch Rate Uniformity in Plasma Etching Reactors" @default.
- Q62124422 name "Effects of Chamber Wall Conditions on Cl Concentration and Si Etch Rate Uniformity in Plasma Etching Reactors" @default.
- Q62124422 type Item @default.
- Q62124422 label "Effects of Chamber Wall Conditions on Cl Concentration and Si Etch Rate Uniformity in Plasma Etching Reactors" @default.
- Q62124422 label "Effects of Chamber Wall Conditions on Cl Concentration and Si Etch Rate Uniformity in Plasma Etching Reactors" @default.
- Q62124422 prefLabel "Effects of Chamber Wall Conditions on Cl Concentration and Si Etch Rate Uniformity in Plasma Etching Reactors" @default.
- Q62124422 prefLabel "Effects of Chamber Wall Conditions on Cl Concentration and Si Etch Rate Uniformity in Plasma Etching Reactors" @default.
- Q62124422 P1433 Q62124422-5214872C-3EEA-4D8E-86B7-58A26C8828D7 @default.
- Q62124422 P1476 Q62124422-3E6C471D-1DAF-404E-A284-78D01544AFAE @default.
- Q62124422 P2093 Q62124422-F4649235-955F-4C06-AE31-30D0E2BCF12C @default.
- Q62124422 P304 Q62124422-786ACBC1-FEDD-471E-BDB6-AC5ADE0D3B34 @default.
- Q62124422 P31 Q62124422-0AE0FDD4-CA80-4421-8615-298FFB6C8CB7 @default.
- Q62124422 P356 Q62124422-28B82F72-A47C-46A4-BF5C-B04048BAA9E1 @default.
- Q62124422 P433 Q62124422-C41D5C94-4F9B-4E12-AFB8-D4BB643A434E @default.
- Q62124422 P478 Q62124422-4B5EF31F-5C9C-46E2-8F8A-38081B777908 @default.
- Q62124422 P50 Q62124422-89A29205-4DB2-4C33-BDDA-68BBB453BF1B @default.
- Q62124422 P577 Q62124422-220E8154-8C3E-4B60-AA92-C7A1596ED479 @default.
- Q62124422 P356 1.1578481 @default.
- Q62124422 P1433 Q3186957 @default.
- Q62124422 P1476 "Effects of Chamber Wall Conditions on Cl Concentration and Si Etch Rate Uniformity in Plasma Etching Reactors" @default.
- Q62124422 P2093 "Tae Won Kim" @default.
- Q62124422 P304 "G418" @default.
- Q62124422 P31 Q13442814 @default.
- Q62124422 P356 "10.1149/1.1578481" @default.
- Q62124422 P433 "7" @default.
- Q62124422 P478 "150" @default.
- Q62124422 P50 Q59425759 @default.
- Q62124422 P577 "2003-01-01T00:00:00Z" @default.