Matches in Wikidata for { <http://www.wikidata.org/entity/Q62124423> ?p ?o ?g. }
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- Q62124423 description "2003 nî lūn-bûn" @default.
- Q62124423 description "2003年の論文" @default.
- Q62124423 description "2003年学术文章" @default.
- Q62124423 description "2003年学术文章" @default.
- Q62124423 description "2003年学术文章" @default.
- Q62124423 description "2003年学术文章" @default.
- Q62124423 description "2003年学术文章" @default.
- Q62124423 description "2003年学术文章" @default.
- Q62124423 description "2003年學術文章" @default.
- Q62124423 description "2003年學術文章" @default.
- Q62124423 description "2003年學術文章" @default.
- Q62124423 description "2003年學術文章" @default.
- Q62124423 description "2003年學術文章" @default.
- Q62124423 description "2003년 논문" @default.
- Q62124423 description "article científic" @default.
- Q62124423 description "article scientific" @default.
- Q62124423 description "article scientifique" @default.
- Q62124423 description "articol științific" @default.
- Q62124423 description "articolo scientifico" @default.
- Q62124423 description "artigo científico" @default.
- Q62124423 description "artigo científico" @default.
- Q62124423 description "artigo científico" @default.
- Q62124423 description "artikel ilmiah" @default.
- Q62124423 description "artikull shkencor" @default.
- Q62124423 description "artikulong pang-agham" @default.
- Q62124423 description "artykuł naukowy" @default.
- Q62124423 description "artículo científico publicado en 2003" @default.
- Q62124423 description "artículu científicu" @default.
- Q62124423 description "bilimsel makale" @default.
- Q62124423 description "bài báo khoa học" @default.
- Q62124423 description "naučni članak" @default.
- Q62124423 description "scienca artikolo" @default.
- Q62124423 description "scientific article published in August 2003" @default.
- Q62124423 description "scientific article published in August 2003" @default.
- Q62124423 description "scientific article published in August 2003" @default.
- Q62124423 description "teaduslik artikkel" @default.
- Q62124423 description "tieteellinen artikkeli" @default.
- Q62124423 description "tudományos cikk" @default.
- Q62124423 description "vedecký článok" @default.
- Q62124423 description "vetenskaplig artikel" @default.
- Q62124423 description "videnskabelig artikel" @default.
- Q62124423 description "vitenskapelig artikkel" @default.
- Q62124423 description "vitskapeleg artikkel" @default.
- Q62124423 description "vědecký článek" @default.
- Q62124423 description "wetenschappelijk artikel" @default.
- Q62124423 description "wissenschaftlicher Artikel" @default.
- Q62124423 description "επιστημονικό άρθρο" @default.
- Q62124423 description "мақолаи илмӣ" @default.
- Q62124423 description "наукова стаття, опублікована в серпні 2003" @default.
- Q62124423 description "научна статия" @default.
- Q62124423 description "научная статья" @default.
- Q62124423 description "научни чланак" @default.
- Q62124423 description "научни чланак" @default.
- Q62124423 description "գիտական հոդված հրատարակված 2003 թվականի օգոստոսին" @default.
- Q62124423 description "מאמר מדעי" @default.
- Q62124423 description "مقالة علمية نشرت في أغسطس 2003" @default.
- Q62124423 description "আগস্ট ২০০৩-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q62124423 description "บทความทางวิทยาศาสตร์" @default.
- Q62124423 description "სამეცნიერო სტატია" @default.
- Q62124423 name "Experimental and theoretical study of two-dimensional ion flux uniformity at the wafer plane in inductively coupled plasmas" @default.
- Q62124423 name "Experimental and theoretical study of two-dimensional ion flux uniformity at the wafer plane in inductively coupled plasmas" @default.
- Q62124423 type Item @default.
- Q62124423 label "Experimental and theoretical study of two-dimensional ion flux uniformity at the wafer plane in inductively coupled plasmas" @default.
- Q62124423 label "Experimental and theoretical study of two-dimensional ion flux uniformity at the wafer plane in inductively coupled plasmas" @default.
- Q62124423 prefLabel "Experimental and theoretical study of two-dimensional ion flux uniformity at the wafer plane in inductively coupled plasmas" @default.
- Q62124423 prefLabel "Experimental and theoretical study of two-dimensional ion flux uniformity at the wafer plane in inductively coupled plasmas" @default.
- Q62124423 P1433 Q62124423-E0682EDB-9EA1-4E1F-A20A-42FB75D607BA @default.
- Q62124423 P1476 Q62124423-5F9FB467-EE1A-4113-87B1-F3A7C2F1A1FC @default.
- Q62124423 P2093 Q62124423-7F30FC69-E6BE-4133-B87F-39510FF9266A @default.
- Q62124423 P2093 Q62124423-BB3E8034-AF7A-44BB-9496-B68C8609DABB @default.
- Q62124423 P304 Q62124423-F4F6C788-4128-436C-9A68-C65A8E72F361 @default.
- Q62124423 P31 Q62124423-91906696-676A-4AFD-BE57-8B1E60DDBE54 @default.
- Q62124423 P356 Q62124423-E73F6937-F625-425D-91DE-64C5951190C1 @default.
- Q62124423 P433 Q62124423-2F052510-6F84-4821-B559-E7C0C940F7AA @default.
- Q62124423 P478 Q62124423-49230AA2-660E-44FA-9ECB-F56968F6E470 @default.
- Q62124423 P577 Q62124423-4732EC78-A7CA-40C2-B1D4-B0F331775BE4 @default.
- Q62124423 P356 TPS.2003.815243 @default.
- Q62124423 P1433 Q4547504 @default.
- Q62124423 P1476 "Experimental and theoretical study of two-dimensional ion flux uniformity at the wafer plane in inductively coupled plasmas" @default.
- Q62124423 P2093 "E.S. Aydil" @default.
- Q62124423 P2093 "Tae Won Kim" @default.
- Q62124423 P304 "614-627" @default.
- Q62124423 P31 Q13442814 @default.
- Q62124423 P356 "10.1109/TPS.2003.815243" @default.
- Q62124423 P433 "4" @default.
- Q62124423 P478 "31" @default.
- Q62124423 P577 "2003-08-01T00:00:00Z" @default.