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- Q62124426 description "2003 nî lūn-bûn" @default.
- Q62124426 description "2003年の論文" @default.
- Q62124426 description "2003年学术文章" @default.
- Q62124426 description "2003年学术文章" @default.
- Q62124426 description "2003年学术文章" @default.
- Q62124426 description "2003年学术文章" @default.
- Q62124426 description "2003年学术文章" @default.
- Q62124426 description "2003年学术文章" @default.
- Q62124426 description "2003年學術文章" @default.
- Q62124426 description "2003年學術文章" @default.
- Q62124426 description "2003年學術文章" @default.
- Q62124426 description "2003年學術文章" @default.
- Q62124426 description "2003年學術文章" @default.
- Q62124426 description "2003년 논문" @default.
- Q62124426 description "article científic" @default.
- Q62124426 description "article scientific" @default.
- Q62124426 description "article scientifique" @default.
- Q62124426 description "articol științific" @default.
- Q62124426 description "articolo scientifico" @default.
- Q62124426 description "artigo científico" @default.
- Q62124426 description "artigo científico" @default.
- Q62124426 description "artigo científico" @default.
- Q62124426 description "artikel ilmiah" @default.
- Q62124426 description "artikull shkencor" @default.
- Q62124426 description "artikulong pang-agham" @default.
- Q62124426 description "artykuł naukowy" @default.
- Q62124426 description "artículo científico publicado en 2003" @default.
- Q62124426 description "artículu científicu" @default.
- Q62124426 description "bilimsel makale" @default.
- Q62124426 description "bài báo khoa học" @default.
- Q62124426 description "naučni članak" @default.
- Q62124426 description "scienca artikolo" @default.
- Q62124426 description "scientific article published in May 2003" @default.
- Q62124426 description "scientific article published in May 2003" @default.
- Q62124426 description "scientific article published in May 2003" @default.
- Q62124426 description "teaduslik artikkel" @default.
- Q62124426 description "tieteellinen artikkeli" @default.
- Q62124426 description "tudományos cikk" @default.
- Q62124426 description "vedecký článok" @default.
- Q62124426 description "vetenskaplig artikel" @default.
- Q62124426 description "videnskabelig artikel" @default.
- Q62124426 description "vitenskapelig artikkel" @default.
- Q62124426 description "vitskapeleg artikkel" @default.
- Q62124426 description "vědecký článek" @default.
- Q62124426 description "wetenschappelijk artikel" @default.
- Q62124426 description "wissenschaftlicher Artikel" @default.
- Q62124426 description "επιστημονικό άρθρο" @default.
- Q62124426 description "мақолаи илмӣ" @default.
- Q62124426 description "наукова стаття, опублікована в травні 2003" @default.
- Q62124426 description "научна статия" @default.
- Q62124426 description "научная статья" @default.
- Q62124426 description "научни чланак" @default.
- Q62124426 description "научни чланак" @default.
- Q62124426 description "מאמר מדעי" @default.
- Q62124426 description "مقالة علمية نشرت في مايو 2003" @default.
- Q62124426 description "মে ২০০৩-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q62124426 description "บทความทางวิทยาศาสตร์" @default.
- Q62124426 description "სამეცნიერო სტატია" @default.
- Q62124426 name "Relation between the ion flux, gas phase composition, and wall conditions in chlorine plasma etching of silicon" @default.
- Q62124426 name "Relation between the ion flux, gas phase composition, and wall conditions in chlorine plasma etching of silicon" @default.
- Q62124426 type Item @default.
- Q62124426 label "Relation between the ion flux, gas phase composition, and wall conditions in chlorine plasma etching of silicon" @default.
- Q62124426 label "Relation between the ion flux, gas phase composition, and wall conditions in chlorine plasma etching of silicon" @default.
- Q62124426 prefLabel "Relation between the ion flux, gas phase composition, and wall conditions in chlorine plasma etching of silicon" @default.
- Q62124426 prefLabel "Relation between the ion flux, gas phase composition, and wall conditions in chlorine plasma etching of silicon" @default.
- Q62124426 P1433 Q62124426-18975DE8-98FD-4CF6-AB1F-F75C9C524D9A @default.
- Q62124426 P1476 Q62124426-A485569A-F495-4261-B0CA-D44DAFA51979 @default.
- Q62124426 P2093 Q62124426-32022EC3-BF7F-4AD2-8991-29ECB69B3A9D @default.
- Q62124426 P2093 Q62124426-5959A8C2-3C24-4D13-B2A4-49C0864B775D @default.
- Q62124426 P2093 Q62124426-E902F77F-3D91-4360-8FE3-CEE72AF1A5A0 @default.
- Q62124426 P304 Q62124426-C487789F-DE43-4C4F-9B36-FA98984DA742 @default.
- Q62124426 P31 Q62124426-33BDC6AE-5D01-4776-899B-E50A3282825F @default.
- Q62124426 P356 Q62124426-61FD111E-FEA3-4BC0-9F2E-B661F2615421 @default.
- Q62124426 P433 Q62124426-1227DC3A-2CB5-4151-AE13-30043C7D3476 @default.
- Q62124426 P478 Q62124426-73BF5C4A-F26F-48B8-98A8-6AECB3A662C3 @default.
- Q62124426 P50 Q62124426-DC69A14F-C71F-4A47-BC4B-7D8392CFE215 @default.
- Q62124426 P577 Q62124426-885B7EB5-D035-4E70-AC21-D356475FECFB @default.
- Q62124426 P356 1.1562176 @default.
- Q62124426 P1433 Q13739484 @default.
- Q62124426 P1476 "Relation between the ion flux, gas phase composition, and wall conditions in chlorine plasma etching of silicon" @default.
- Q62124426 P2093 "Saurabh J. Ullal" @default.
- Q62124426 P2093 "Tae Won Kim" @default.
- Q62124426 P2093 "Vahid Vahedi" @default.
- Q62124426 P304 "589-595" @default.
- Q62124426 P31 Q13442814 @default.
- Q62124426 P356 "10.1116/1.1562176" @default.
- Q62124426 P433 "3" @default.
- Q62124426 P478 "21" @default.
- Q62124426 P50 Q59425759 @default.
- Q62124426 P577 "2003-05-01T00:00:00Z" @default.