Matches in Wikidata for { <http://www.wikidata.org/entity/Q62124437> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- Q62124437 description "2002 nî lūn-bûn" @default.
- Q62124437 description "2002年の論文" @default.
- Q62124437 description "2002年学术文章" @default.
- Q62124437 description "2002年学术文章" @default.
- Q62124437 description "2002年学术文章" @default.
- Q62124437 description "2002年学术文章" @default.
- Q62124437 description "2002年学术文章" @default.
- Q62124437 description "2002年学术文章" @default.
- Q62124437 description "2002年學術文章" @default.
- Q62124437 description "2002年學術文章" @default.
- Q62124437 description "2002年學術文章" @default.
- Q62124437 description "2002年學術文章" @default.
- Q62124437 description "2002年學術文章" @default.
- Q62124437 description "2002년 논문" @default.
- Q62124437 description "article científic" @default.
- Q62124437 description "article scientific" @default.
- Q62124437 description "article scientifique" @default.
- Q62124437 description "articol științific" @default.
- Q62124437 description "articolo scientifico" @default.
- Q62124437 description "artigo científico" @default.
- Q62124437 description "artigo científico" @default.
- Q62124437 description "artigo científico" @default.
- Q62124437 description "artikel ilmiah" @default.
- Q62124437 description "artikull shkencor" @default.
- Q62124437 description "artikulong pang-agham" @default.
- Q62124437 description "artykuł naukowy" @default.
- Q62124437 description "artículo científico publicado en 2002" @default.
- Q62124437 description "artículu científicu" @default.
- Q62124437 description "bilimsel makale" @default.
- Q62124437 description "bài báo khoa học" @default.
- Q62124437 description "naučni članak" @default.
- Q62124437 description "scienca artikolo" @default.
- Q62124437 description "scientific article published in July 2002" @default.
- Q62124437 description "scientific article published in July 2002" @default.
- Q62124437 description "scientific article published in July 2002" @default.
- Q62124437 description "teaduslik artikkel" @default.
- Q62124437 description "tieteellinen artikkeli" @default.
- Q62124437 description "tudományos cikk" @default.
- Q62124437 description "vedecký článok" @default.
- Q62124437 description "vetenskaplig artikel" @default.
- Q62124437 description "videnskabelig artikel" @default.
- Q62124437 description "vitenskapelig artikkel" @default.
- Q62124437 description "vitskapeleg artikkel" @default.
- Q62124437 description "vědecký článek" @default.
- Q62124437 description "wetenschappelijk artikel" @default.
- Q62124437 description "wissenschaftlicher Artikel" @default.
- Q62124437 description "επιστημονικό άρθρο" @default.
- Q62124437 description "мақолаи илмӣ" @default.
- Q62124437 description "наукова стаття, опублікована в липні 2002" @default.
- Q62124437 description "научна статия" @default.
- Q62124437 description "научная статья" @default.
- Q62124437 description "научни чланак" @default.
- Q62124437 description "научни чланак" @default.
- Q62124437 description "מאמר מדעי" @default.
- Q62124437 description "مقالة علمية نشرت في يوليو 2002" @default.
- Q62124437 description "জুলাই ২০০২-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q62124437 description "บทความทางวิทยาศาสตร์" @default.
- Q62124437 description "სამეცნიერო სტატია" @default.
- Q62124437 name "Maintaining reproducible plasma reactor wall conditions: SF6 plasma cleaning of films deposited on chamber walls during Cl2/O2 plasma etching of Si" @default.
- Q62124437 name "Maintaining reproducible plasma reactor wall conditions: SF6 plasma cleaning of films deposited on chamber walls during Cl2/O2 plasma etching of Si" @default.
- Q62124437 type Item @default.
- Q62124437 label "Maintaining reproducible plasma reactor wall conditions: SF6 plasma cleaning of films deposited on chamber walls during Cl2/O2 plasma etching of Si" @default.
- Q62124437 label "Maintaining reproducible plasma reactor wall conditions: SF6 plasma cleaning of films deposited on chamber walls during Cl2/O2 plasma etching of Si" @default.
- Q62124437 prefLabel "Maintaining reproducible plasma reactor wall conditions: SF6 plasma cleaning of films deposited on chamber walls during Cl2/O2 plasma etching of Si" @default.
- Q62124437 prefLabel "Maintaining reproducible plasma reactor wall conditions: SF6 plasma cleaning of films deposited on chamber walls during Cl2/O2 plasma etching of Si" @default.
- Q62124437 P1433 Q62124437-9997B912-5CE5-409D-B716-26309AD2CA6A @default.
- Q62124437 P1476 Q62124437-C97C93B2-7000-4EDF-9729-336B91385AD2 @default.
- Q62124437 P2093 Q62124437-414334F1-A8A4-4C2D-8F75-6F25226DC70F @default.
- Q62124437 P2093 Q62124437-8B529873-4F2C-4424-ABCC-4349207AD92E @default.
- Q62124437 P2093 Q62124437-B94F238D-E644-47E8-B7DE-C4448D54DEBD @default.
- Q62124437 P2093 Q62124437-CFF874AF-FB7A-47E0-9E39-F68F8B32F46C @default.
- Q62124437 P304 Q62124437-3ED4782D-FC55-4597-AD9F-2B9842F74FD3 @default.
- Q62124437 P31 Q62124437-9360A5E4-E7F9-4197-BE98-466779399CA2 @default.
- Q62124437 P356 Q62124437-C760513E-4272-4000-998A-2DA826326844 @default.
- Q62124437 P433 Q62124437-412BB7AA-0F3E-42C1-9FBD-959A8959C8B8 @default.
- Q62124437 P478 Q62124437-5572B6A3-F855-4679-9728-DF965607B282 @default.
- Q62124437 P50 Q62124437-1C565B71-6AF3-4770-999B-3C8BA3EE7A72 @default.
- Q62124437 P577 Q62124437-F01967E1-B496-4E88-89DE-6B0A6955FE6F @default.
- Q62124437 P921 Q62124437-811AD4B0-0EF9-42F6-B88D-6BAA12663E96 @default.
- Q62124437 P921 Q62124437-97D54A2F-A9D8-43C8-8B19-D234CEFEA56F @default.
- Q62124437 P356 1.1479733 @default.
- Q62124437 P1433 Q13739484 @default.
- Q62124437 P1476 "Maintaining reproducible plasma reactor wall conditions: SF6 plasma cleaning of films deposited on chamber walls during Cl2/O2 plasma etching of Si" @default.
- Q62124437 P2093 "Harmeet Singh" @default.
- Q62124437 P2093 "John Daugherty" @default.
- Q62124437 P2093 "Saurabh J. Ullal" @default.
- Q62124437 P2093 "Vahid Vahedi" @default.
- Q62124437 P304 "1195-1201" @default.
- Q62124437 P31 Q13442814 @default.
- Q62124437 P356 "10.1116/1.1479733" @default.
- Q62124437 P433 "4" @default.
- Q62124437 P478 "20" @default.
- Q62124437 P50 Q59425759 @default.
- Q62124437 P577 "2002-07-01T00:00:00Z" @default.
- Q62124437 P921 Q1425625 @default.
- Q62124437 P921 Q279055 @default.