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- Q62393382 description "article" @default.
- Q62393382 description "wetenschappelijk artikel" @default.
- Q62393382 description "наукова стаття, опублікована в травні 2014" @default.
- Q62393382 name "Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives" @default.
- Q62393382 name "Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives" @default.
- Q62393382 type Item @default.
- Q62393382 label "Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives" @default.
- Q62393382 label "Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives" @default.
- Q62393382 prefLabel "Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives" @default.
- Q62393382 prefLabel "Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives" @default.
- Q62393382 P1476 Q62393382-78623849-8F75-4697-AD1F-68192BE72573 @default.
- Q62393382 P2093 Q62393382-52CCCB04-7431-4052-8FC3-29B8BCD8DD7A @default.
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- Q62393382 P2093 Q62393382-B3086869-9CD6-4134-A110-F770BD990591 @default.
- Q62393382 P31 Q62393382-346F7B20-74D2-48AC-8CFC-DB77A5430666 @default.
- Q62393382 P356 Q62393382-D5515B86-2B44-43C3-A90E-692A364832FE @default.
- Q62393382 P577 Q62393382-F6EB2436-30CF-4589-9ACC-A7BC7E129825 @default.
- Q62393382 P356 12.2053347 @default.
- Q62393382 P1476 "Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives" @default.
- Q62393382 P2093 "A. Kenda" @default.
- Q62393382 P2093 "A. Simon" @default.
- Q62393382 P2093 "A. Tortschanoff" @default.
- Q62393382 P2093 "H. Schenk" @default.
- Q62393382 P2093 "M. Kraft" @default.
- Q62393382 P2093 "S. Lüttjohann" @default.
- Q62393382 P2093 "T. Sandner" @default.
- Q62393382 P2093 "W. Scherf" @default.
- Q62393382 P31 Q13442814 @default.
- Q62393382 P356 "10.1117/12.2053347" @default.
- Q62393382 P577 "2014-05-21T00:00:00Z" @default.