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- Q62476002 description "article scientifique publié en 2007" @default.
- Q62476002 description "article" @default.
- Q62476002 description "wetenschappelijk artikel" @default.
- Q62476002 description "наукова стаття, опублікована у 2007" @default.
- Q62476002 description "հոդված" @default.
- Q62476002 name "Low bias reactive ion etching of GaAs with a SiCl[sub 4]∕N[sub 2]∕O[sub 2] time-multiplexed process" @default.
- Q62476002 name "Low bias reactive ion etching of GaAs with a SiCl[sub 4]∕N[sub 2]∕O[sub 2] time-multiplexed process" @default.
- Q62476002 type Item @default.
- Q62476002 label "Low bias reactive ion etching of GaAs with a SiCl[sub 4]∕N[sub 2]∕O[sub 2] time-multiplexed process" @default.
- Q62476002 label "Low bias reactive ion etching of GaAs with a SiCl[sub 4]∕N[sub 2]∕O[sub 2] time-multiplexed process" @default.
- Q62476002 prefLabel "Low bias reactive ion etching of GaAs with a SiCl[sub 4]∕N[sub 2]∕O[sub 2] time-multiplexed process" @default.
- Q62476002 prefLabel "Low bias reactive ion etching of GaAs with a SiCl[sub 4]∕N[sub 2]∕O[sub 2] time-multiplexed process" @default.
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- Q62476002 P2093 Q62476002-AC3AE3C8-7147-4699-9F80-E95187233B37 @default.
- Q62476002 P304 Q62476002-74577388-A24D-48A7-83F4-36389DB199DC @default.
- Q62476002 P31 Q62476002-C4A0EEE7-B581-41D6-B309-435681EC7C20 @default.
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- Q62476002 P433 Q62476002-34F031B2-5894-447B-8231-2AB8A9B73920 @default.
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- Q62476002 P577 Q62476002-96A39457-BA53-4405-B91F-1829090CAFF9 @default.
- Q62476002 P921 Q62476002-A4D34A7D-6C85-466A-A49D-23325B1EC82A @default.
- Q62476002 P356 1.2737439 @default.
- Q62476002 P1433 Q13739491 @default.
- Q62476002 P1476 "Low bias reactive ion etching of GaAs with a SiCl[sub 4]∕N[sub 2]∕O[sub 2] time-multiplexed process" @default.
- Q62476002 P2093 "G. Strasser" @default.
- Q62476002 P2093 "S. Golka" @default.
- Q62476002 P2093 "S. Schartner" @default.
- Q62476002 P2093 "W. Schrenk" @default.
- Q62476002 P304 "839" @default.
- Q62476002 P31 Q13442814 @default.
- Q62476002 P356 "10.1116/1.2737439" @default.
- Q62476002 P433 "3" @default.
- Q62476002 P478 "25" @default.
- Q62476002 P577 "2007-01-01T00:00:00Z" @default.
- Q62476002 P921 Q742736 @default.