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- Q62515643 description "article scientifique publié en 2005" @default.
- Q62515643 description "wetenschappelijk artikel" @default.
- Q62515643 description "наукова стаття, опублікована в листопаді 2005" @default.
- Q62515643 name "Ion beam etching of high resolution structures in Ta2O5 for grating-assisted directional coupler applications" @default.
- Q62515643 name "Ion beam etching of high resolution structures in Ta2O5 for grating-assisted directional coupler applications" @default.
- Q62515643 type Item @default.
- Q62515643 label "Ion beam etching of high resolution structures in Ta2O5 for grating-assisted directional coupler applications" @default.
- Q62515643 label "Ion beam etching of high resolution structures in Ta2O5 for grating-assisted directional coupler applications" @default.
- Q62515643 prefLabel "Ion beam etching of high resolution structures in Ta2O5 for grating-assisted directional coupler applications" @default.
- Q62515643 prefLabel "Ion beam etching of high resolution structures in Ta2O5 for grating-assisted directional coupler applications" @default.
- Q62515643 P1433 Q62515643-F542ABF5-5D15-4661-A304-B74D5AFCACB6 @default.
- Q62515643 P1476 Q62515643-ABAF6520-2EE1-4C2B-BE03-C08FCD032305 @default.
- Q62515643 P2093 Q62515643-33925CAC-1806-4687-BCCC-04C16AA1850D @default.
- Q62515643 P2093 Q62515643-746B6FBB-CE68-44AF-9F26-2C687517E491 @default.
- Q62515643 P304 Q62515643-FE730D7A-6E54-48F9-95E2-63A37730595A @default.
- Q62515643 P31 Q62515643-58922FBD-EFE8-4C3A-A2ED-612505934E86 @default.
- Q62515643 P356 Q62515643-EFCDD869-1BCB-4973-A79A-1377B21F6E08 @default.
- Q62515643 P433 Q62515643-12A46EEA-3272-4F9C-BA1B-E413736BEB25 @default.
- Q62515643 P478 Q62515643-377E4EB9-3F93-461C-874E-7424E59CFA6A @default.
- Q62515643 P50 Q62515643-052FA360-5B73-422E-85BF-87B006E48164 @default.
- Q62515643 P577 Q62515643-E28E09A1-62E8-4E2D-B3E2-718F6172D1A0 @default.
- Q62515643 P356 J.APSUSC.2005.01.153 @default.
- Q62515643 P1433 Q2772524 @default.
- Q62515643 P1476 "Ion beam etching of high resolution structures in Ta2O5 for grating-assisted directional coupler applications" @default.
- Q62515643 P2093 "Andreas Perentos" @default.
- Q62515643 P2093 "Anthony Holland" @default.
- Q62515643 P304 "1006-1012" @default.
- Q62515643 P31 Q13442814 @default.
- Q62515643 P356 "10.1016/J.APSUSC.2005.01.153" @default.
- Q62515643 P433 "4" @default.
- Q62515643 P478 "252" @default.
- Q62515643 P50 Q47504536 @default.
- Q62515643 P577 "2005-11-01T00:00:00Z" @default.