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- Q62519315 description "im April 1991 veröffentlichter wissenschaftlicher Artikel" @default.
- Q62519315 description "wetenschappelijk artikel" @default.
- Q62519315 description "наукова стаття, опублікована у квітні 1991" @default.
- Q62519315 name "Nanometer Patterning by Electron Beam Lithography Using an Amorphous Carbon Film as an Intermediate Layer" @default.
- Q62519315 name "Nanometer Patterning by Electron Beam Lithography Using an Amorphous Carbon Film as an Intermediate Layer" @default.
- Q62519315 type Item @default.
- Q62519315 label "Nanometer Patterning by Electron Beam Lithography Using an Amorphous Carbon Film as an Intermediate Layer" @default.
- Q62519315 label "Nanometer Patterning by Electron Beam Lithography Using an Amorphous Carbon Film as an Intermediate Layer" @default.
- Q62519315 prefLabel "Nanometer Patterning by Electron Beam Lithography Using an Amorphous Carbon Film as an Intermediate Layer" @default.
- Q62519315 prefLabel "Nanometer Patterning by Electron Beam Lithography Using an Amorphous Carbon Film as an Intermediate Layer" @default.
- Q62519315 P1433 Q62519315-B7506685-518F-4173-B13B-CE104C7D02D5 @default.
- Q62519315 P1476 Q62519315-DB14EDCD-DAE5-4537-B4A5-AA94EE7D1554 @default.
- Q62519315 P2093 Q62519315-01CFFE16-0C05-4D30-B641-5AB4B38785C2 @default.
- Q62519315 P2093 Q62519315-0AC017EA-0F23-4A0B-AB10-0A4F91457683 @default.
- Q62519315 P2093 Q62519315-82D076D6-0630-421B-833B-C5D6DFDD0509 @default.
- Q62519315 P304 Q62519315-C0D503C3-34BE-4793-B0E5-A9D39DAA180F @default.
- Q62519315 P31 Q62519315-929CB6A7-0678-4E2D-81E6-87D9CAD25694 @default.
- Q62519315 P356 Q62519315-27E10DC7-4641-4E24-A40C-1AA7C71E63E5 @default.
- Q62519315 P433 Q62519315-A1C865FC-0FBA-4D9A-9D8B-C0C707C84717 @default.
- Q62519315 P478 Q62519315-25240A8B-D542-4C9B-B407-B52D4E4E62C7 @default.
- Q62519315 P577 Q62519315-2682E696-4A34-4ED2-ACB9-32B9CC0AD926 @default.
- Q62519315 P356 JJAP.30.890 @default.
- Q62519315 P1433 Q2366671 @default.
- Q62519315 P1476 "Nanometer Patterning by Electron Beam Lithography Using an Amorphous Carbon Film as an Intermediate Layer" @default.
- Q62519315 P2093 "Hideaki Nakakita" @default.
- Q62519315 P2093 "Kazuhiro Shimizu" @default.
- Q62519315 P2093 "Shunri Oda" @default.
- Q62519315 P304 "890-891" @default.
- Q62519315 P31 Q13442814 @default.
- Q62519315 P356 "10.1143/JJAP.30.890" @default.
- Q62519315 P433 "Part 1, No. 4" @default.
- Q62519315 P478 "30" @default.
- Q62519315 P577 "1991-04-15T00:00:00Z" @default.