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- Q62565706 description "article scientifique publié en 2001" @default.
- Q62565706 description "im September 2001 veröffentlichter wissenschaftlicher Artikel" @default.
- Q62565706 description "wetenschappelijk artikel" @default.
- Q62565706 description "наукова стаття, опублікована у вересні 2001" @default.
- Q62565706 name "The introducing of fluorine into the deposition of BN: a successful method to obtain high-quality, thick cBN films with low residual stress" @default.
- Q62565706 name "The introducing of fluorine into the deposition of BN: a successful method to obtain high-quality, thick cBN films with low residual stress" @default.
- Q62565706 type Item @default.
- Q62565706 label "The introducing of fluorine into the deposition of BN: a successful method to obtain high-quality, thick cBN films with low residual stress" @default.
- Q62565706 label "The introducing of fluorine into the deposition of BN: a successful method to obtain high-quality, thick cBN films with low residual stress" @default.
- Q62565706 prefLabel "The introducing of fluorine into the deposition of BN: a successful method to obtain high-quality, thick cBN films with low residual stress" @default.
- Q62565706 prefLabel "The introducing of fluorine into the deposition of BN: a successful method to obtain high-quality, thick cBN films with low residual stress" @default.
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- Q62565706 P1476 Q62565706-2309590B-F71E-4B3B-9B02-232F4A383693 @default.
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- Q62565706 P2860 Q62565706-B6C313B0-9D55-49D0-BE07-16A457023856 @default.
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- Q62565706 P304 Q62565706-04F6C8F5-399A-4569-97DE-438AB2055CDA @default.
- Q62565706 P31 Q62565706-B6E0BE75-F9E8-4CA5-8A12-6BC07C79E8A5 @default.
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- Q62565706 P478 Q62565706-BAD3529E-7297-458E-915C-76AAC78F3B32 @default.
- Q62565706 P577 Q62565706-3A6FAA4F-6A8A-4549-8914-1ADE51586A1B @default.
- Q62565706 P356 S0925-9635(01)00461-7 @default.
- Q62565706 P1433 Q15757085 @default.
- Q62565706 P1476 "The introducing of fluorine into the deposition of BN: a successful method to obtain high-quality, thick cBN films with low residual stress" @default.
- Q62565706 P2093 "Seiichiro Matsumoto" @default.
- Q62565706 P2093 "W.J Zhang" @default.
- Q62565706 P2860 Q108808785 @default.
- Q62565706 P2860 Q56038975 @default.
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- Q62565706 P2860 Q62565708 @default.
- Q62565706 P304 "1868-1874" @default.
- Q62565706 P31 Q13442814 @default.
- Q62565706 P356 "10.1016/S0925-9635(01)00461-7" @default.
- Q62565706 P433 "9-10" @default.
- Q62565706 P478 "10" @default.
- Q62565706 P577 "2001-09-01T00:00:00Z" @default.