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- Q62570402 description "article scientifique publié en 1996" @default.
- Q62570402 description "wetenschappelijk artikel" @default.
- Q62570402 description "наукова стаття, опублікована у вересні 1996" @default.
- Q62570402 name "Removal of polishing-induced damage from 6H-SiC" @default.
- Q62570402 name "Removal of polishing-induced damage from 6H-SiC(0001) substrates by hydrogen etching" @default.
- Q62570402 type Item @default.
- Q62570402 label "Removal of polishing-induced damage from 6H-SiC" @default.
- Q62570402 label "Removal of polishing-induced damage from 6H-SiC(0001) substrates by hydrogen etching" @default.
- Q62570402 prefLabel "Removal of polishing-induced damage from 6H-SiC" @default.
- Q62570402 prefLabel "Removal of polishing-induced damage from 6H-SiC(0001) substrates by hydrogen etching" @default.
- Q62570402 P1433 Q62570402-AFA8EAD9-43F4-4C3A-83B4-56F3321CA76B @default.
- Q62570402 P1476 Q62570402-33CCD4D6-197B-40C0-BAFC-4A1F57789913 @default.
- Q62570402 P2093 Q62570402-0386BB11-961A-4026-9729-5B4FC4F670F1 @default.
- Q62570402 P2093 Q62570402-2DE79E18-B8F5-4E18-A40A-536B2869822D @default.
- Q62570402 P2093 Q62570402-3423A1D8-4DCA-41A1-8DDD-1D146E9BE6EB @default.
- Q62570402 P304 Q62570402-6E84B81A-6C66-4BB1-8B52-8D3F2FB2CEB3 @default.
- Q62570402 P31 Q62570402-5957A769-99FE-415B-8A0E-166745B7AB6F @default.
- Q62570402 P356 Q62570402-114508FD-197A-402A-95AC-F9318B377AC1 @default.
- Q62570402 P433 Q62570402-DF49AA50-2273-470A-B20E-4DCC3C898A77 @default.
- Q62570402 P478 Q62570402-E89FF64F-C075-4715-A629-E98D311B8273 @default.
- Q62570402 P50 Q62570402-EF1D1933-CCE9-483A-91FB-3817D74906B1 @default.
- Q62570402 P577 Q62570402-EF2C41FF-A804-460D-8F39-B3C4A6FA734B @default.
- Q62570402 P356 0022-0248(96)00296-5 @default.
- Q62570402 P1433 Q1929756 @default.
- Q62570402 P1476 "Removal of polishing-induced damage from 6H-SiC(0001) substrates by hydrogen etching" @default.
- Q62570402 P2093 "C. Hallin" @default.
- Q62570402 P2093 "Fredrik Owman" @default.
- Q62570402 P2093 "Per Mårtensson" @default.
- Q62570402 P304 "391-395" @default.
- Q62570402 P31 Q13442814 @default.
- Q62570402 P356 "10.1016/0022-0248(96)00296-5" @default.
- Q62570402 P433 "1-2" @default.
- Q62570402 P478 "167" @default.
- Q62570402 P50 Q57390166 @default.
- Q62570402 P577 "1996-09-01T00:00:00Z" @default.