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- Q62578742 description "article scientifique publié en 2004" @default.
- Q62578742 description "wetenschappelijk artikel" @default.
- Q62578742 description "наукова стаття, опублікована в липні 2004" @default.
- Q62578742 name "Influence of gas on cutting silicon with solid state laser" @default.
- Q62578742 name "Influence of gas on cutting silicon with solid state laser" @default.
- Q62578742 type Item @default.
- Q62578742 label "Influence of gas on cutting silicon with solid state laser" @default.
- Q62578742 label "Influence of gas on cutting silicon with solid state laser" @default.
- Q62578742 prefLabel "Influence of gas on cutting silicon with solid state laser" @default.
- Q62578742 prefLabel "Influence of gas on cutting silicon with solid state laser" @default.
- Q62578742 P1476 Q62578742-D7AEF2A6-71D1-4FA1-A539-DF8DAAEC7CAA @default.
- Q62578742 P2093 Q62578742-07DDCF52-AFF9-4D5B-B287-5691D4E01FD6 @default.
- Q62578742 P2093 Q62578742-09DE8693-3D9E-4ED9-8078-9EA66A653CAC @default.
- Q62578742 P2093 Q62578742-6CD5E3F2-4B0C-448D-88FA-970027F6C1F7 @default.
- Q62578742 P2093 Q62578742-90392DDE-8AFB-4133-9868-F8B25D991D43 @default.
- Q62578742 P2093 Q62578742-B752C08C-0EAD-4343-AE17-A746CA700921 @default.
- Q62578742 P2093 Q62578742-D35F38B5-5674-4465-866E-FEC405B53DFB @default.
- Q62578742 P2093 Q62578742-EDEDFFDC-87C3-47C1-8BCF-7A249CED2174 @default.
- Q62578742 P31 Q62578742-E275C755-F6A5-42F3-BD94-766C394FD360 @default.
- Q62578742 P356 Q62578742-62CC9FCA-9419-4DE3-8F63-DCD18A06737F @default.
- Q62578742 P577 Q62578742-FBABC386-E544-44F9-82CA-1CBF433525D4 @default.
- Q62578742 P356 12.532133 @default.
- Q62578742 P1476 "Influence of gas on cutting silicon with solid state laser" @default.
- Q62578742 P2093 "Eckhard Beyer" @default.
- Q62578742 P2093 "F. Sonntag" @default.
- Q62578742 P2093 "Michael Doetschel" @default.
- Q62578742 P2093 "Michael Panzner" @default.
- Q62578742 P2093 "Stephanie Maelzer" @default.
- Q62578742 P2093 "Thomas Kuntze" @default.
- Q62578742 P2093 "Udo Klotzbach" @default.
- Q62578742 P31 Q13442814 @default.
- Q62578742 P356 "10.1117/12.532133" @default.
- Q62578742 P577 "2004-07-15T00:00:00Z" @default.